Ferroelectric-type nonvolatile semiconductor memory

ABSTRACT

A ferroelectric-type nonvolatile semiconductor memory comprising a plurality of bit lines and a plurality of memory cells, each memory cell comprising a first electrode, a ferroelectric layer formed at least on said first electrode and a second electrode formed on said ferroelectric layer, a plurality of the memory cells belonging to one of two or more thermal history groups having different thermal histories with regard to their production processes, data of 1 bit being to be stored in one of memory cells forming a pair, another data of 1 bit being to be stored in the other of said memory cells, a pair of said memory cells being connected to a pair of the bit lines, a pair of the bit lines being connected to a differential sense amplifier, wherein, when data stored in one of said memory cells forming a pair is read out, a reference potential is provided to the bit line connected to the other of said memory cells, when another data stored in the other of said memory cells is read out, a reference potential is provided to the bit line connected to the one of said memory cells, and a reference potential of the same level is provided to the bit lines connected to the memory cells belonging to the same thermal history group, and reference potentials of different levels are provided to the bit lines connected to the memory cells belonging to the different thermal history groups.

BACKGROUND OF THE INVENTION AND RELATED ART STATEMENT

The present invention relates to a ferroelectric-type nonvolatilesemiconductor memory (so-called FERAM).

In recent years, studies are actively made with regard to a mass-storageferroelectric-type nonvolatile semiconductor memory. Aferroelectric-type nonvolatile semiconductor memory (to be sometimesabbreviated as “nonvolatile memory” hereinafter) permits fast access andis nonvolatile, and it is small in size and consumes low-level electricpower. Further, the nonvolatile memory has high impact-resistant, and itis expected to be used as a main memory in various electronic deviceshaving file storage and resume functions, such as a portable computer, acellular phone and a game machine, or to be used as a recording mediumfor recording voices and video images.

The above nonvolatile memory is a fast rewritable nonvolatile memoryaccording to a method in which fast polarization inversion of aferroelectric thin film and residual polarization thereof are used, anda change in an accumulated charge amount in a memory cell (capacitormember) having a ferroelectric layer is detected. In principle, itcomprises the memory cell (capacitor member) and a transistor forselection (transistor for switching). The memory cell (capacitor member)comprises, for example, a lower electrode, an upper electrode and aferroelectric layer interposed between them. Reading-out and writing ofdata in the above nonvolatile memory is carried out by application of aP-E hysteresis loop of a ferroelectric material shown in FIG. 26. Thatis, when an external electric field is applied to the ferroelectriclayer and then removed, the ferroelectric layer exhibits residualpolarization. The residual polarization of the ferroelectric layer comesto be +P_(r) when an external electric field in the plus direction isapplied, and it comes to be −P_(r) when an external electric field inthe minus direction is applied. In this case, a case where the residualpolarization is in a +P_(r) state (see “D” in FIG. 26) is taken as “0”,and a case where the residual polarization is in a −P_(r) state (see “A”in FIG. 26) is taken as “1”.

For discriminating states of “1” and “0”, an external electric field,for example, in the plus direction is applied to the ferroelectriclayer, whereby the polarization of the ferroelectric layer comes to bein a “C” state in FIG. 26. When the data is “0”, the polarization stateof the ferroelectric layer changes from “D” to “C”. When the data is“1”, the polarization state of the ferroelectric layer changes from “A”to “C” through “B”. When the data is “0”, no polarization inversiontakes place in the ferroelectric layer. When the data is “1”,polarization inversion takes place in the ferroelectric layer. As aresult, there is caused a difference in the accumulated charge amount inthe memory cell. The transistor for selection in a selected nonvolatilememory is turned on, whereby the accumulated charge is detected as asignal current. When the external electric field is changed to 0 afterthe data is read out, the polarization state of the ferroelectric layercomes into a “D” state in FIG. 26 both when the data is “0” and when thedata is “1”. That is, when the data is read out, the data “1” is oncedestroyed. When the data is “1”, therefore, an external electric fieldin the minus direction is applied, so that the polarization state isbrought into “A” state through “D” and “E” to re-write data “1”.

The structure and the operation of a currently mainstream nonvolatilememory are proposed by S. Sheffiled et al in U.S. Pat. No. 4,873,664.This nonvolatile memory comprises, for example, transistors forselection TR₁₁ and TR₁₂ and memory cells (capacitor member) FC₁₁ andFC₁₂ as FIG. 27 shows its circuit diagram. In FIG. 27, each nonvolatilememory is surrounded by a dotted line.

Concerning two-digit or three-digit subscripts, for example, a subscript“11” is a subscript that should be shown as “1,1”, and for example, asubscript “111” is a subscript that should be shown as “1,1,1”. Forsimplified showing, the subscripts are shown as two-digit or three-digitsubscripts. Further, a subscript “M” is used to show, for example, allof a plurality of memory cells or plate lines, and a subscript “m” isused to show, for example, individuals of a plurality of memory cells orplate lines. A subscript “N” is used to show, for example, all oftransistors for selection or sub-memory units, and a subscript “n” isused to show, for example, individuals of the transistors for selectionor sub-memory units.

Complement data is written into each memory cell, and the memory cellsstore 1 bit. In FIG. 27, symbol “WL” stands for a word line, symbol “BL”stands for a bit line, and symbol “PL” stands for a plate line. When onenonvolatile memory is taken, a word line WL₁ is connected to a word linedecoder/driver WD. Bit lines BL₁ and BL₂ are connected to a differentialsense amplifier SA. A plate line PL₁ is connected to a plate linedecoder/driver PD.

When stored data is read out from the thus-structured nonvolatilememory, the word line WL₁ is selected and the plate line PL₁ is driven.In this case, complement data appears in a pair of the bit lines BL₁ andBL₂ as voltages (bit line voltages) from a pair of the memory cells FC₁₁and FC₁₂ through the transistors for selection TR₁₁ and TR₁₂. Thevoltages (bit line voltages) in a pair of the bit lines BL₁ and BL₂ aredetected with the sense amplifier SA.

One nonvolatile memory occupies a region surrounded by the word line WL₁and a pair of the bit lines BL₁ and BL₂. If word lines and bit lines arearranged at a smallest pitch, therefore, the smallest area that onenonvolatile memory can have is 8F² when the minimum processabledimension is F. The thus-structured nonvolatile memory therefore has thesmallest area of 8F². However, two transistors for selection and twomemory cells are required for constituting one nonvolatile memory.Further, it is required to arrange the plate lines at the same pitch asthat at which the word lines are arranged. It is therefore almostimpossible to arrange the nonvolatile memories at the minimum pitch, andin reality, the area that one nonvolatile memory occupies comes to bemuch greater than 8F².

Moreover, it is also required to arrange the word line decoder/driversWD and the plate line decoder/drivers PD at a pitch equal to a pitch atwhich the nonvolatile memories are arranged. In other words, twodecoder/drivers are required for selecting one row-address. It istherefore difficult to layout peripheral circuits, and the area that theperipheral circuits occupy comes to be large.

One of means for decreasing the area of the nonvolatile memory isdisclosed in JP-A-9-121032. As shown in an equivalent circuit of FIG.28, the nonvolatile memory disclosed in the above laid-open PatentPublication comprises a plurality of memory cells MC_(1M) (for example,M=4) and a plurality of memory cells MC_(2M). The memory cells MC_(1M)and the memory cells MC_(2M) form pairs. Ends of the memory cellsMC_(1M) are connected to one end of the transistor for selection TR₁ inparallel, and ends of the memory cells MC_(2M) are connected to one endof the transistor for selection TR₂ in parallel. The other ends of thetransistors for selection TR₁ and TR₂ are connected to bit lines BL₁ andBL₂, respectively. The bit lines BL₁ and BL₂ forming a pair areconnected to a differential sense amplifier SA. The other ends of thememory cells MC_(1m) and MC_(2m) (m=1, 2 . . . M) are connected to aplate line PL_(m), and the plate line PL_(m) is connected to a plateline decoder/driver PD. A word line WL is connected to a word linedecoder/driver WD.

Complement data is stored in a pair of the memory cells MC_(1m) andMC_(2m) (m=1, 2 . . . M). For reading-out of data stored, for example,in the memory cells MC_(1m) and MC_(2m) (wherein m is one of 1, 2, 3 and4), the word line WL is selected, and in a state where a voltage of (½)V_(cc) is applied to the plate line PL_(j) (m≠j), the plate line PL_(m)is driven. The above V_(cc) is, for example, a power source voltage. Bythe above operation, the complement data appears in a pair of the bitlines BL₁ and BL₂ as voltages (bit line voltages) from a pair of thememory cells MC_(1m) and MC_(2m) through the transistors for selectionTR₁ and TR₂. And, the differential sense amplifier SA detects thevoltages (bit line voltages) in a pair of the bit lines BL₁ and BL₂.

A pair of the transistors for selection TR₁ and TR₂ in the nonvolatilememory occupy a region surrounded by the word lines WL and a pair of thebit lines BL₁ and BL₂. If the word lines and the bit lines are arrangedat the smallest pitch, therefore, a pair of the transistors forselection TR₁ and TR₂ in the nonvolatile memory have a minimum area of8F². Since, however, a pair of the transistors for selection TR₁ and TR₂are shared by M sets of pairs of the memory cells MC_(1m) and MC_(2m)(m=1, 2 . . . M), the number of the transistors for selection TR₁ andTR₂ per bit can be decreased, and the layout of the word lines WL ismoderate, so that the nonvolatile memory can be easily decreased insize. Further, with regard to peripheral circuits, M bits can beselected with one word line decoder/driver WD and the plate linedecoder/drivers PD that are M in number. When the above constitution isemployed, therefore, a layout in which the cell area is close to 8F² canbe attained, and a chip size almost equal to a DRAM can be attained.

For increasing the capacity of the nonvolatile memory, it is essentialto make finer memory cells, and it is also inevitably required todecrease the area of the ferroelectric layer. However, with a decreasein the area of the ferroelectric layer, naturally, the amount of anaccumulated charge decreases.

As measures to take to solve the problem that the amount of anaccumulated charge decreases, it is conceivable to stack the memorycells FC₁₁ and FC₁₂ or the memory cells MC_(1M) and MC_(2M) through aninsulating layer in the nonvolatile memory shown in FIG. 27 or 28.

When the memory cells are stacked through the insulating layer asdescribed above, the thermal history of the ferroelectric layerconstituting the memory cell FC₁₁ or the memory cell MC_(1M) comes todiffer from the thermal history of the ferroelectric layer constitutingthe memory cell FC₁₂ or the memory cell MC_(2M). That is, for formingthe ferroelectric layer, it is required to heat-treat a ferroelectricthin film for crystallization thereof after the formation of theferroelectric thin film. Therefore, a ferroelectric layer constituting amemory cell positioned in a lower layer (stage) is crystallized to agreater extent than a ferroelectric layer constituting a memory cellpositioned in an upper layer (stage), which causes a difference inpolarization properties between the memory cell positioned in a lowerlayer and the memory cell positioned in an upper layer. Even if thememory cell positioned in a lower layer and the memory cell positionedin an upper layer store the same data, therefore, there is caused adifference between potentials that appear in the bit lines. The abovephenomenon causes an operation margin to decrease, and in a worst case,an error is made in reading-out of data, and the nonvolatile memory isdegraded in reliability.

OBJECT AND SUMMARY OF THE INVENTION

It is therefore an object of the present invention to provide aferroelectric-type nonvolatile semiconductor memory having aconstitution in which a difference between potentials that appear in bitlines is suppressed even if memory cell groups having different thermalhistories with regard to their production processes are included.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of first to fourth aspects of the present invention to beexplained hereinafter, data of 1 bit is stored in one memory cell. Inthe ferroelectric-type nonvolatile semiconductor memory according to anyone of fifth to seventh aspects of the present invention to be explainedhereinafter, data (complement data) of 1 bit is stored in a pair ofmemory cells.

That is, the ferroelectric-type nonvolatile semiconductor memoryaccording to the first aspect of the present invention for achieving theabove object comprises a plurality of bit lines and a plurality ofmemory cells,

-   -   each memory cell comprising a first electrode, a ferroelectric        layer formed at least on said first electrode and a second        electrode formed on said ferroelectric layer,    -   a plurality of the memory cells belonging to one of two or more        thermal history groups having different thermal histories with        regard to their production processes,    -   data of 1 bit being to be stored in one of memory cells forming        a pair, another data of 1 bit being to be stored in the other of        said memory cells, a pair of said memory cells being connected        to a pair of the bit lines,    -   a pair of the bit lines being connected to a differential sense        amplifier,    -   wherein, when data stored in one of said memory cells forming a        pair is read out, a reference potential is provided to the bit        line connected to the other of said memory cells,    -   when another data stored in the other of said memory cells is        read out, a reference potential is provided to the bit line        connected to the one of said memory cells, and    -   a reference potential of the same level is provided to the bit        lines connected to the memory cells belonging to the same        thermal history group, and reference potentials of different        levels are provided to the bit lines connected to the memory        cells belonging to the different thermal history groups.

The ferroelectric-type nonvolatile semiconductor memory according to thefirst aspect of the present invention may have a constitution in which

-   -   the memory cells have a structure in which the memory cells are        stacked through an insulating layer,    -   the memory cells formed on one insulating layer belong to the        thermal history group different from the thermal history group        to which the memory cells formed on other insulating layer        belong, and    -   the memory cells formed on the same insulating layer belong to        the same thermal history group.

The ferroelectric-type nonvolatile semiconductor memory according to thefirst aspect of the present invention may have a constitution in whichreference capacitors are further provided as many as the thermal historygroups and output potentials of the reference capacitors differ one fromanother.

The ferroelectric-type nonvolatile semiconductor memory according to thesecond aspect of the present invention for achieving the above objectcomprises a first memory unit and a second memory unit;

-   -   said first memory unit having;    -   (A-1) a first bit line,    -   (B-1) a first transistor for selection,    -   (C-1) first sub-memory units which are N in number (N≧2) and        each of which is composed of memory cells which are M in number        (M≧2), and    -   (D-1) plate lines which are M×N in number, and    -   said second memory unit having;    -   (A-2) a second bit line,    -   (B-2) a second transistor for selection,    -   (C-2) second sub-memory units which are N in number and each of        which is composed of memory cells which are M in number, and    -   (D-2) the plate lines which are M×N in number and are shared        with the plate limes which are M×N in number and constitute said        first memory unit,    -   wherein the first sub-memory unit of an n-th layer (n=1, 2 . . .        , N) and the second sub-memory unit of the n-th layer are formed        on the same insulating layer,    -   the first sub-memory unit of an n′-th layer (n′=2 . . . N) and        the second sub-memory unit of the n′-th layer are stacked on the        first sub-memory unit of the (n′−1)-th layer and the second        sub-memory unit of the (n′−1)-th layer through the insulating        layer,    -   each memory cell comprises a first electrode, a ferroelectric        layer and a second electrode,    -   in the first memory unit, the first electrodes of the memory        cells constituting the first sub-memory unit of the n-th layer        are in common with the first sub-memory unit of the n-th layer,        said common first electrode is connected to the first bit line        through the first transistor for selection, and the second        electrode of the memory cell in an m-th-place (m=1, 2 . . . M)        is connected to the common plate line in the        [(n−1)M+m]-th-place,    -   in the second memory unit, the first electrodes of the memory        cells constituting the second sub-memory unit of the n-th layer        are in common with the second sub-memory unit of the n-th layer,        said common first electrode is connected to the second bit line        through the second transistor for selection, and the second        electrode of the memory cell in the m-th-place is connected to        the common plate line in the [(n−1)M+m]-th-place,    -   the memory cells constituting the first sub-memory unit of the        n-th layer and the memory cells constituting the second        sub-memory unit of the n-th layer have the same thermal history        with regard to their production processes,    -   the memory cells constituting the first sub-memory unit of the        n-th layer and the memory cells constituting the second        sub-memory unit of the n-th layer have the thermal history        different from the thermal history of the memory cells        constituting the first sub-memory unit of a k-th layer (k≠n) and        the memory cells constituting the second sub-memory unit of the        k-th layer,    -   the memory cell in the m-th-place constituting the first        sub-memory unit of the n-th layer in the first memory unit and        the memory cell in the m-th-place constituting the second        sub-memory unit of the n-th layer in the second memory unit form        a pair to store data of 1 bit each,    -   a reference potential having an n-th potential is provided to        the second bit line when data stored in the memory cell        constituting the first sub-memory unit of the n-th layer in the        first memory unit is read out,    -   a reference potential having an n-th potential is provided to        the first bit line when data stored in the memory cell        constituting the second sub-memory unit of the n-th layer in the        second memory unit is read out, and    -   the n-th potential differs from the k-th potential (ken).

The ferroelectric-type nonvolatile semiconductor memory according to thethird aspect of the present invention for achieving the above objectcomprises a first memory unit and a second memory unit;

-   -   said first memory unit having;    -   (A-1) a first bit line,    -   (B-1) first transistors for selection which are N in number        (N≧2),    -   (C-1) first sub-memory units which are N in number and each of        which is composed of memory cells which are M in number (M≧2),        and    -   (D-1) plate lines which are M in number and each of which is        shared with each memory cell constituting each of the first        sub-memory units which are N in number, between or among the        first sub-memory units which are N in number, and    -   said second memory unit having;    -   (A-2) a second bit line,    -   (B-2) second transistors for selection which are N in number,    -   (C-2) second sub-memory units which are N in number and each of        which is composed of memory cells which are M in number, and    -   (D-2) the plate lines which are M in number, each of which is        shared with each memory cell constituting each of the second        sub-memory units which are N in number, between or among the        second sub-memory units which are N in number, and which are        shared with the plate lines which constitute said first memory        unit and are M in number,    -   wherein the first sub-memory unit of an n-th layer (n=1, 2 . .        . N) and the second sub-memory unit of the n-th layer are formed        on the same insulating layer,    -   the first sub-memory unit of an n′-th layer (n′=2 . . . N) and        the second sub-memory unit of the n′-th layer are stacked on the        first sub-memory unit of the (n′−1)-th layer and the second        sub-memory unit of the (n′−1)-th layer through the insulating        layer,    -   each memory cell comprises a first electrode, a ferroelectric        layer and a second electrode,    -   in the first memory unit, the first electrodes of the memory        cells constituting the first sub-memory unit of the n-th layer        are in common with the first sub-memory unit of the n-th layer,        said common first electrode is connected to the first bit line        through the n-th-place first transistor for selection, and the        second electrode of the memory cell in an m-th-place (m=1, 2 . .        . M) is connected to the common plate line in the m-th-place,    -   in the second memory unit, the first electrodes of the memory        cells constituting the second sub-memory unit of the n-th layer        are in common with the second sub-memory unit of the n-th layer,        said common first electrode is connected to the second bit line        through the n-th-place second transistor for selection, and the        second electrode of the memory cell in the m-th-place is        connected to the common plate line in the m-th-place,    -   the memory cells constituting the first sub-memory unit of the        n-th layer and the memory cells constituting the second        sub-memory unit of the n-th layer have the same thermal history        with regard to their production processes,    -   the memory cells constituting the first sub-memory unit of the        n-th layer and the memory cells constituting the second        sub-memory unit of the n-th layer have the thermal history        different from the thermal history of the memory cells        constituting the first sub-memory unit of a k-th layer (k≠n) and        the memory cells constituting the second sub-memory unit of the        k-th layer,    -   the memory cell in the m-th-place constituting the first        sub-memory unit of the n-th layer in the first memory unit and        the memory cell in the m-th-place constituting the second        sub-memory unit of the n-th layer in the second memory unit form        a pair to store data of 1 bit each,    -   a reference potential having an n-th potential is provided to        the second bit line when data stored in the memory cell        constituting the first sub-memory unit of the n-th layer in the        first memory unit is read out,    -   a reference potential having an n-th potential is provided to        the first bit line when data stored in the memory cell        constituting the second sub-memory unit of the n-th layer in the        second memory unit is read out, and    -   the n-th potential differs from the k-th potential (k≠n).

The ferroelectric-type nonvolatile semiconductor memory according to thethird aspect of the present invention may have a constitution in which

-   -   the first bit lines which are N in number and the second bit        lines which are N in number are provided,    -   the common first electrode in the first sub-memory unit of the        n-th layer is connected to the n-th-place first bit line through        the n-th-place first transistor for selection in the first        memory unit,    -   the common first electrode in the second sub-memory unit of the        n-th layer is connected to the n-th-place second bit line        through the n-th-place second transistor for selection in the        second memory unit,    -   the reference potential having the n-th potential is provided to        the n-th-place second bit line when data stored in the memory        cell constituting the first sub-memory unit of the n-th layer in        the first memory unit is read out, and    -   the reference potential having the n-th potential is provided to        the n-th-place first bit line when data stored in the memory        cell constituting the second sub-memory unit of the n-th layer        in the second memory unit is read out.

The ferroelectric-type nonvolatile semiconductor memory according to thefourth aspect of the present invention for achieving the above object isa so-called gain-cell type ferroelectric-type nonvolatile semiconductormemory and comprises a first memory unit and a second memory unit;

-   -   said first memory unit having;    -   (A-1) a first bit line,    -   (B-1) first transistors for selection which are N in number        (N≧2),    -   (C-1) first sub-memory units which are N in number and each of        which is composed of memory cells which are M in number (M≧2),    -   (D-1) plate lines which are M in number and each of which is        shared with each memory cell constituting each of the first        sub-memory units which are N in number, between or among the        first sub-memory units which are N in number,    -   (E-1) a first transistor for writing-in,    -   (F-1) a first transistor for detection, and    -   (G-1) a first transistor for read-out, and    -   said second memory unit having;    -   (A-2) a second bit line,    -   (B-2) second transistors for selection which are N in number,    -   (C-2) second sub-memory units which are N in number and each of        which is composed of memory cells which are M in number,    -   (D-2) the plate lines which are M in number, each of which is        shared with each memory cell constituting each of the second        sub-memory units which are N in number, between or among the        second sub-memory units which are N in number, and which are        shared with the plate lines which constitute said first memory        unit and are M in number,    -   (E-2) a second transistor for writing-in,    -   (F-2) a second transistor for detection, and    -   (G-2) a second transistor for read-out,    -   wherein the first sub-memory unit of an n-th layer (n=1, 2 . .        . N) and the second sub-memory unit of the n-th layer are formed        on the same insulating layer,    -   the first sub-memory unit of an n′-th layer (n′=2 . . . N) and        the second sub-memory unit of the n′-th layer are stacked on the        first sub-memory unit of the (n′−1)-th layer and the second        sub-memory unit of the (n′−1)-th layer through the insulating        layer,    -   each memory cell comprises a first electrode, a ferroelectric        layer and a second electrode,    -   in the first memory unit, the first electrodes of the memory        cells constituting the first sub-memory unit of the n-th layer        are in common with the first sub-memory unit of the n-th layer,        said common first electrode is connected to the first bit line        through the n-th-place first transistor for selection and the        first transistor for writing-in, and the second electrode of the        memory cell in an m-th-place (m=1, 2 . . . M) is connected to        the common plate line in the m-th-place,    -   in the second memory unit, the first electrodes of the memory        cells constituting the second sub-memory unit of the n-th layer        are in common with the second sub-memory unit of the n-th layer,        said common first electrode is connected to the second bit line        through the n-th-place second transistor for selection and the        second transistor for writing-in, and the second electrode of        the memory cell in the m-th-place is connected to the common        plate line in the m-th-place,    -   the memory cells constituting the first sub-memory unit of the        n-th layer and the memory cells constituting the second        sub-memory unit of the n-th layer have the thermal history with        regard to their production processes,    -   the memory cells constituting the first sub-memory unit of the        n-th layer and the memory cells constituting the second        sub-memory unit of the n-th layer have the thermal history        different from the thermal history of the memory cells        constituting the first sub-memory unit of a k-th layer (k≠n) and        the memory cells constituting the second sub-memory unit of the        k-th layer,    -   the memory cell in the m-th-place constituting the first        sub-memory unit of the n-th layer in the first memory unit and        the memory cell in the m-th-place constituting the second        sub-memory unit of the n-th layer in the second memory unit form        a pair to store data of 1 bit each,    -   one end of the first transistor for detection is connected to a        first wiring having a predetermined potential, and the other end        thereof is connected to the first bit line through the first        transistor for read-out,    -   one end of the second transistor for detection is connected to a        second wiring having a predetermined potential, and the other        end thereof is connected to the second bit line through the        second transistor for read-out,    -   the n-th-place first transistor for selection and the first        transistor for read-out are brought into a conducting state when        data stored in the memory cell constituting the first sub-memory        unit of the n-th layer in the first memory unit is read out, the        operation of the first transistor for detection is controlled        with a potential that occurs in the common first electrode on        the basis of data stored in said memory cell, and a reference        potential having an n-th potential is provided to the second bit        line,    -   the n-th-place second transistor for selection and the second        transistor for read-out are brought into a conducting state when        data stored in the memory cell constituting the second        sub-memory unit of the n-th layer in the second memory unit is        read out, the operation of the second transistor for detection        is controlled with a potential that occurs in the common first        electrode on the basis of data stored in said memory cell, and a        reference potential having an n-th potential is provided to the        first bit line, and    -   the n-th potential differs from the k-th potential (k≠n).

As a specific constitution of the ferroelectric-type nonvolatilesemiconductor memory according to the fourth aspect of the presentinvention, when various transistors are formed from FETs, there may beemployed a constitution in which one source/drain region of thetransistor for writing-in is connected to the bit line, the othersource/drain region thereof is connected to one source/drain region ofeach of the transistors for selection which are N in number, the othersource/drain region of the n-th-place transistor for selection isconnected to the common first electrode constituting the memory unit ofthe n-th layer, one source/drain region of the transistor for detectionis connected to a wiring having a predetermined potential, the othersource/drain region thereof is connected to one source/drain region ofthe transistor for read-out, the other source/drain region of thetransistor for read-out is connected to the bit line, and onesource/drain region of the transistor for selection or the othersource/drain region of the transistor for writing-in is connected to thegate electrode of the transistor for detection. The constitution inwhich the other source/drain region of the transistor for detection isconnected to one source/drain region of the transistor for read-outincludes a constitution in which the other source/drain region of thetransistor for detection and one source/drain region of the transistorfor read-out occupy one source/drain region.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of the first to fourth aspects of the present invention,preferably, the reference potential is a potential having anintermediate value between the potential that appears in the bit linewhen data “1” is read out and the potential that appears in the bit linewhen data “0” is read out, or a value around the above intermediatevalue.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of the second to fourth aspects of the present invention, then-th potential differs from the k-th potential (k≠n). However, there maybe employed a constitution in which sub-memory units of N layers aredivided into groups which are less than N in number, and differentreference potentials are provided to the groups. Specifically, when N=4,there may be employed a constitution in which the first potential andthe second potential are at one level, and the third potential and thefourth potential are at other one level, namely, the first and secondpotentials differ from the third and fourth potentials.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of the second to fourth aspects of the present invention, theremay be employed a constitution in which reference capacitors which are Nin number are further provided and the reference capacitor in ann-th-place provides a reference potential having an n-th potential. Inthis case, preferably, the reference capacitor in the n-th-place has athermal history that is the same as the thermal history of the memorycells constituting the first sub-memory unit of the n-th layer and thememory cells constituting the second sub-memory unit of the n-th layer.Further, preferably, the first sub-memory unit of the n-th layer, thesecond sub-memory unit of the n-th layer and the reference capacitor inthe n-th-place are formed on the same insulating layer. Theabove-constituted reference capacitor includes a ferroelectric capacitorhaving a structure in which a ferroelectric material is sandwichedbetween two electrodes. When the reference capacitor is constituted of aferroelectric capacitor, the reference capacitor in the n-th-place has athermal history that is the same as the thermal history of the memorycells constituting the first sub-memory unit of the n-th layer and thememory cells constituting the second sub-memory unit of the n-th layer,and further, the first sub-memory unit of the n-th layer, the secondsub-memory unit of the n-th layer and the reference capacitor in then-th-place are formed on the same insulating layer, so that there can beobtained a stabilized output potential, i.e., reference potential of thereference capacitor. In this case, the reference potential from thereference capacitor can be optimized, for example, by changing the areaof capacitor member of the reference capacitor, or by constituting thereference capacitor from a plurality of reference capacitor membersconnected in parallel and fuse portions, measuring an outputtedreference potential and breaking the fuse portion(s) by fusing toeliminate unnecessary reference capacitor members from the otherreference capacitor members. Generally, a ferroelectric material hasnegative temperature characteristics. That is, with an increase in thetemperature of a ferroelectric layer, the values of residualpolarization P_(r) and coercive field (coercive force) decrease. Whenthe reference capacitor is constituted of a ferroelectric capacitor, thepotential outputted from the reference capacitor has negativetemperature characteristics, and the potential outputted from thereference capacitor follows a temperature-dependent change in thecharacteristic of the memory cells, which is preferred. Further, thereference capacitor made of a ferroelectric capacitor can be producedconcurrently with the production of the memory cells, so that noadditional step is required in the production of the ferroelectric-typenonvolatile semiconductor memory.

Alternatively, in the ferroelectric-type nonvolatile semiconductormemory according to any one of the first to fourth aspects of thepresent invention, the reference capacitor includes, for example, a MOScapacitor. In this case, the reference potential outputted. % from thereference capacitor can be optimized, for example, by changing the areaof capacitor member of the reference capacitor or by constituting thereference capacitor from a plurality of reference capacitor membersconnected in parallel and fuse portions, measuring an outputtedreference potential and breaking the fuse portion(s) by fusing toeliminate unnecessary reference capacitor members from the otherreference capacitor members. Alternatively, the reference-potential maybe outputted from a known voltage down converter or a structure in whicha plurality of PMOS FETs are connected in series. In the latter case,when the threshold voltage of each PMOS FET is V_(th), the referencepotential outputted come to be (number of stages of PMOS FETS)×V_(th).

The ferroelectric-type nonvolatile semiconductor memory according to thefifth aspect of the present invention for achieving the above objectcomprises a plurality of memory cells each of which comprises a firstelectrode, a ferroelectric layer formed at least on said first electrodeand a second electrode formed on said ferroelectric layer,

-   -   a plurality of the memory cells belonging to one of two or more        thermal history groups having different thermal histories with        regard to their production processes,    -   wherein complementary 1 bit data is stored in a pair of the        memory cells, and    -   said pair of the memory cells belong to the same thermal history        group.

The ferroelectric-type nonvolatile semiconductor memory according to thefifth aspect of the present invention may have a constitution in which

-   -   the memory cells have a structure in which the memory cells are        stacked through an insulating layer,    -   the memory cells formed on one insulating layer belong to the        thermal history group different from the thermal history group        to which the memory cells formed on other insulating layer        belong, and    -   the memory cells formed on the same insulating layer belong to        the same thermal history group.

The ferroelectric-type nonvolatile semiconductor memory according to thesixth aspect of the present invention for achieving the above objectcomprises a first memory unit and a second memory unit;

-   -   said first memory unit having,    -   (A-1) a first bit line,    -   (B-1) a first transistor for selection,    -   (C-1) first sub-memory units which are N in number (N≧2) and        each of which is composed of memory cells which are M in number        (M≧2), and    -   (D-1) plate lines which are M×N in number, and    -   said second memory unit having;    -   (A-2) a second bit line,    -   (B-2) a second transistor for selection,    -   (C-2) second sub-memory units which are N in number and each of        which is composed of memory cells which are M in number, and    -   (D-2) the plate lines which are M×N in number and are shared        with the plate lines which are M×N in number and constitute said        first memory unit,    -   wherein the first sub-memory unit of an n-th layer (n=1, 2 . .        . N) and the second sub-memory unit of the n-th layer are formed        on the same insulating layer,    -   the first sub-memory unit of an n′-th layer (n′=2 . . . N) and        the second sub-memory unit of the n′-th layer are stacked on the        first sub-memory unit of the (n′−1)-th layer and the second        sub-memory unit of the (n′−1)-th layer through the insulating        layer,    -   each memory cell comprises a first electrode, a ferroelectric        layer and a second electrode,    -   in the first memory unit, the first electrodes of the memory        cells constituting first sub-memory unit of the n-th layer are        in common with the first sub-memory unit of the n-th layer, said        common first electrode is connected to the first bit line        through the first transistor for selection, and the second        electrode of the memory cell in an m-th-place (m=1, 2 . . . M)        is connected to the common plate line in the        [(n−1)M+m]-th-place,    -   in the second memory unit, the first electrodes of the memory        cells constituting the second sub-memory unit of the n-th layer        are in common with the second sub-memory unit of the n-th layer,        said common first electrode is connected to the second bit line        through the second transistor for selection, and the second        electrode of the memory cell in the m-th-place is connected to        the common plate line in the [(n−1)M+m]-th-place,    -   the memory cells constituting the first sub-memory unit of the        n-th layer and the memory cells constituting the second        sub-memory unit of the n-th layer have the same thermal history        with regard to their production processes,    -   the memory cells constituting the first sub-memory unit of the        n-th layer and the memory cells constituting the second        sub-memory unit of the n-th layer have the thermal history        different from the thermal history of the memory cells        constituting the first sub-memory unit of a k-th layer (k≠n) and        the memory cells constituting the second sub-memory unit of the        k-th layer, and    -   the memory cell in the m-th-place constituting the first        sub-memory unit of the n-th layer in the first memory unit and        the memory cell in the m-th-place constituting the second        sub-memory unit of the n-th layer in the second memory unit form        a pair to store complement data.

The ferroelectric-type nonvolatile semiconductor memory according to theseventh aspect of the present invention for achieving the above objectcomprises a first memory unit and a second memory unit;

-   -   said first memory unit having;    -   (A-1) a first bit line,    -   (B-1) first transistors for selection which are N in number        (N≧2),    -   (C-1) first sub-memory units which are N in number and each of        which is composed of memory cells which are M in number (M≧2),        and    -   (D-1) plate lines which are M in number and each of which is        shared with each memory cell constituting each of the first        sub-memory units which are N in number, between or among the        first sub-memory units which are N in number, and    -   said second memory unit having;    -   (A-2) a second bit line,    -   (B-2) second transistors for selection which are N in number,    -   (C-2) second sub-memory units which are N in number and each of        which is composed of memory cells which are M in number, and    -   (D-2) the plate lines which are M in number, each of which is        shared with each memory cell constituting each of the second        sub-memory unit which are N in number, between or among the        second sub-memory units which are N in number, and which are        shared with the plate lines which are M in number and constitute        said first memory unit,    -   wherein the first sub-memory unit of an n-th layer (n=1, 2 . .        . N) and the second sub-memory unit of the n-th layer are formed        on the same insulating layer,    -   the first sub-memory unit of an n′-th layer (n′=2 . . . N) and        the second sub-memory unit of the n′-th layer are stacked on the        first sub-memory unit of the (n′−1)-th layer and the second        sub-memory unit of the (n′−1)-th layer through the insulating        layer, and    -   each memory cell comprises a first electrode, a ferroelectric        layer and a second electrode,    -   in the first memory unit, the first electrodes of the memory        cells constituting the first sub-memory unit of the n-th layer        are in common with the first sub-memory unit of the n-th layer,        said common first electrode is connected to the first bit line        through the n-th-place first transistor for selection, and the        second electrode of the memory cell in an m-th-place (m=1, 2 . .        . M) is connected to the common plate line in the m-th-place,    -   in the second memory unit, the first electrodes of the memory        cells constituting the second sub-memory unit of the n-th layer        are in common with the second sub-memory unit of the n-th layer,        said common first electrode is connected to the second bit line        through the n-th-place second transistor for selection, and the        second electrode of the memory cell in the m-th-place is        connected to the common plate line in the m-th-place,    -   the memory cells constituting the first sub-memory unit of the        n-th layer and the memory cells constituting the second        sub-memory unit of the n-th layer have the same thermal history        with regard to their production processes,    -   the memory cells constituting the first sub-memory unit of the        n-th layer and the memory cells constituting the second        sub-memory unit of the n-th layer have the thermal history        different from the thermal history of the memory cells        constituting the first sub-memory unit of a k-th layer (k≠n) and        the memory cells constituting the second sub-memory unit of the        k-th layer, and    -   the memory cell in the m-th-place constituting the first        sub-memory unit of the n-th layer in the first memory unit and        the memory cell in the m-th-place constituting the second        sub-memory unit of the n-th layer in the second memory unit form        a pair to store complement data.

In the ferroelectric-type nonvolatile semiconductor memory according tothe seventh aspect of the present invention, there may be employed aconstitution in which

-   -   the first bit lines which are N in number and the second bit        lines which are N in number are provided,    -   the common first electrode in the first sub-memory unit of the        n-th layer is connected to the n-th-place first bit line through        the n-th-place first transistor for selection in the first        memory unit, and    -   the common first electrode in the second sub-memory unit of the        n-th layer is connected to the n-th-place second bit line        through the n-th-place second transistor for selection in the        second memory unit.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of the second to fourth aspects of the present invention, thetransistor for selection constituting the first memory unit and thetransistor for selection constituting the second memory unit areconnected to different word lines. In the ferroelectric-type nonvolatilesemiconductor memory according to any one of the sixth and seventhaspects of the present invention, preferably, the transistor forselection constituting the first memory unit and the transistor forselection constituting the second memory unit are connected to the sameword line. However, they may be connected to different word lines solong as they can be driven concurrently.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of the second to fourth, sixth and seventh aspects of thepresent invention, the value of M can be any value so long as itsatisfies M≧2, and examples of actual value of M include exponents of 2(2, 4, 8 . . . ). Further, the value of N can be any value so long as itsatisfies N≧2, and examples of actual value of N include exponents of 2(2, 4, 8 . . . ). In the ferroelectric-type nonvolatile semiconductormemory according to the fourth aspect of the present invention,desirably, the value of M satisfies 2≦M≦128, preferably 4≦M≦32.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of the second to fourth, sixth and seventh aspects of thepresent invention, a plurality of the memory cells share one transistorfor selection. And, the sub-memory units are constituted in a stackedstructure, whereby the limitation imposed by the number of transistorsthat occupy the surface of the semiconductor substrate is no longer anylimitation, the storage capacity can be remarkably increased as comparedwith any conventional ferroelectric-type nonvolatile semiconductormemory, and the effective occupation area per bit storage unit can beremarkably decreased.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of the second to fourth, sixth and seventh aspects of thepresent invention, an address selection in the row direction is carriedout in a two-dimensional matrix constituted of the transistor forselection and the plate lines. For example, when a selection unit of rowaddresses is constituted of the sub-memory units of N layers, eighttransistors for selection and eight plate lines, memory cells of 64×Nbits or 32×N bits can be selected with 16 decoder/driver circuits. Evenwhen the integration degree of a ferroelectric-type nonvolatilesemiconductor memory is equal to a conventional one, therefore, thestorage capacity can be increased to a multiple of 4N or 2N. Further,the number of peripheral circuits or driving wirings for addressselection can be decreased.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of the second to fourth, sixth and seventh aspects of thepresent invention, there may be employed a constitution in which thecrystallization temperature of the ferroelectric layer constituting thememory cells of the sub-memory unit positioned above is lower than thecrystallization temperature of the ferroelectric layer constituting thememory cells of the sub-memory unit positioned below. Thecrystallization temperature can be investigated with an X-raydiffraction apparatus or a surface scanning electron microscope.Specifically, the crystallization temperature of the ferroelectric layercan be determined as follows. For example, a ferroelectric materiallayer is formed and then heat-treated at various heat treatmenttemperatures for crystallization of the ferroelectric material layer,and the heat-treated ferroelectric material layer is subjected to X-raydiffraction analysis, to evaluate the layer for a diffraction patternstrength (height of diffraction peak) characteristic of theferroelectric material.

Meanwhile, when a ferroelectric-type nonvolatile semiconductor memoryhaving a constitution of stacked sub-memory units is produced, it isrequired to carry out heat treatments (to be referred to as“crystallization heat treatment” hereinafter) for crystallization of aferroelectric thin film constituting the ferroelectric layer as manytimes as the number of stages of the stacked sub-memory units. As aresult, a sub-memory unit positioned in a lower stage undergoes thecrystallization heat treatment for a longer period of time, and asub-memory unit positioned in an upper stage undergoes thecrystallization heat treatment for a shorter period of time. That is,they differ in their thermal histories. Therefore, when an optimumcrystallization heat treatment is carried out on the sub-memory unitpositioned in an upper stage, the sub-memory unit positioned in a lowerstage may suffer an excess heat load and may deteriorate in properties.It is conceivable to employ a method in which multi-staged sub-memoryunits are formed and then subjected to the crystallization heattreatment once. However, the ferroelectric layers are caused to have agreat change in volume, or the ferroelectric layers highly possiblycause degassing, during crystallization, and there is liable to be aproblem that the ferroelectric layers undergo cracking or peeling.

It is therefore arranged that the crystallization temperature of theferroelectric layer constituting the sub-memory unit positioned in anupper stage is lower than the crystallization temperature of theferroelectric layer constituting the sub-memory unit positioned in alower stage. In this case, even if the crystallization heat treatmentsare carried out as many times as the number of stages of the sub-memoryunits stacked, there is hardly caused such a problem that the memorycells constituting the sub-memory units in a lower stage deteriorate inproperties. Further, with regard to the memory cells constituting thesub-memory units in each stage, the crystallization heat treatment canbe carried out under optimum conditions, and a ferroelectric-typenonvolatile semiconductor memory excellent in properties can beobtained. The following Table 1 below shows crystallization temperaturesof typical materials for constituting the ferroelectric layer, while thematerial for constituting the ferroelectric layer shall not be limitedthereto. TABLE 1 Material Crystallization temperature Bi₂SrTa₂O₉700-800° C. Bi₂Sr(Ta_(1.5),Nb_(0.5))O₉ 650-750° C. Bi₄Ti₃O₁₂ 600-700° C.Pb(Zr_(0.48),Ti_(0.52))O₃ 550-650° C. PbTiO₃ 500-600° C.

In the ferroelectric-type nonvolatile semiconductor memory according tothe first to seventh aspects of the present invention (these will besometimes generally and simply referred to as “ferroelectric-typenonvolatile semiconductor memory of the present invention” hereinafter),for example, various transistors are formed in a silicon semiconductorsubstrate, an insulating layer is formed on these various transistors,and the memory cells or sub-memory units are formed on the insulatinglayer, which is preferred in view of decreasing the cell area.

The material for the ferroelectric layer constituting ferroelectric-typenonvolatile semiconductor memory of the present invention includesbismuth layer compounds, more specifically, a Bi-containinglayer-structured perovskite-type ferroelectric material. TheBi-containing layer-structured perovskite-type ferroelectric materialcomes under so-called non-stoichiometric compounds, and shows toleranceof compositional deviations in both sites of a metal element and anions(O, etc.). Further, it is not a rare case that the above material havinga composition deviated from its stoichiometric composition to someextent exhibits optimum electric characteristics. The Bi-containinglayer-structured perovskite-type ferroelectric material can beexpressed, for example, by the general formula,(Bi₂O₂)²⁺(A_(m−1)B_(m)O_(3m+1))²⁻wherein “A” is one metal selected from the group consisting of metalssuch as Bi, Pb, Ba, Sr, Ca, Na, K, Cd, etc., and “B” is one metalselected from the group consisting of Ti, Nb, Ta, W, Mo, Fe, Co and Cror a combination of a plurality of these metals combined in any amountratio, and m is an integer of 1 or more.

Alternatively, the material for constituting the ferroelectric layerpreferably contains, as a main crystal phase, a crystal phaserepresented by the formula (1),(Bi_(X), Sr_(1-X))₂(Sr_(Y), Bi_(1-Y))(Ta_(Z), Nb_(1-Z))₂O_(d)  (1)wherein 0.9≦X≦1.0, 0.7≦Y≦1.0, 0≦Z≦1.0, and 8.7≦d≦9.3.

Otherwise, the material for constituting the ferroelectric layerpreferably contains, as a main crystal phase, a crystal phaserepresented by the formula (2),Bi_(X)Sr_(Y)Ta₂O_(d)  (2)wherein X+Y=3, 0.7≦Y≦1.3 and 8.7≦d≦9.3.

In the above case, more preferably, the material for constituting theferroelectric layer preferably contains, as a main crystal phase, atleast 85% of a crystal phase represented by the formula (1) or (2). Inthe above formula (1), (Bi_(X), Sr_(1-X)) means that Sr occupies thesite that Bi should have occupied in a crystal structure and that theBi:Sr amount ratio is X:(1-X). Further, (Sr_(Y), Bi_(1-Y)) means that Bioccupies the site that Sr should have occupied in a crystal structureand that the Sr:Bi amount ratio is Y:(1-Y). The material forconstituting the ferroelectric layer and containing, as a main crystalphase, the crystal phase of the above formula (1) or (2), may contain anoxide of Bi, oxides of Ta and Nb and composite oxides of Bi, Ta and Nbto some extent.

Alternatively, the material for constituting the ferroelectric layer maycontain a crystal phase represented by the formula (3),Bi_(X)(Sr, Ca, Ba)_(Y)(Ta_(Z), Nb_(1-Z))₂O_(d)  (3)wherein 1.7≦X≦2.5, 0.6≦Y≦1.2, 0≦Z≦1.0 and 8.0≦d≦10.0. (Sr, Ca, Ba)stands for one element selected from the group consisting of Sr, Ca andBa. When the above material for the ferroelectric layer, having theabove formulae, is expressed by a stoichiometric composition, thecomposition includes Bi₂SrTa₂O₉, Bi₂SrNb₂O₉, Bi₂BaTa₂O₉ and Bi₂SrTaNbO₉.Otherwise, the material for constituting the ferroelectric layer alsoincludes Bi₄SrTi₄O₁₅, Bi₄Ti₃O₁₂ and Bi₂PbTa₂O₉. In these cases, theamount ratio of the metal elements may be varied to such an extent thatthe crystal structure does not change. That is, the above material mayhave a composition deviated from its stoichiometric composition in bothsites of metal elements and oxygen element.

Alternatively, the material for constituting the ferroelectric layerincludes PbTiO₃, lead titanate zirconate [PZT, Pb(Zr_(1-y), Ti_(y))O₃wherein 0≦y≦1] which is a solid solution of PbZrO₃ and PbTiO₃ having aperovskite structure, and PZT-containing compounds such as PLZT which isa metal oxide prepared by adding La to PZT and PNZT which is a metaloxide prepared by adding Nb to PZT.

In the above-explained materials for constituting the ferroelectriclayer, the crystallization temperature thereof can be changed bydeviating their compositions from their stoichiometric compositions.

In the ferroelectric-type nonvolatile semiconductor memory of thepresent invention, there may be employed a constitution in which thefirst electrode is formed below the ferroelectric layer and the secondelectrode is formed on the ferroelectric layer (that is, the firstelectrode corresponds to the lower electrode and the second electrodecorresponds to the upper electrode), or there may be employed aconstitution in which the first electrode is formed on the ferroelectriclayer and the second electrode is formed below the ferroelectric layer(that is, the first electrode corresponds to the upper electrode and thesecond electrode corresponds to the lower electrode). There may beemployed a constitution in which the plate line extends from the secondelectrode, or the plate line is formed separately from the secondelectrode and is connected to the second electrode. In the latter case,the wiring material for constituting the plate line includes, forexample, aluminum and an aluminum-containing alloy. The structure inwhich the first electrodes are in common specifically includes astructure in which the first electrode in the form of stripes is formedand the ferroelectric layer is formed on the entire surface of thestriped first electrode. In the above structure, an overlapping regionof the first electrode, the ferroelectric layer and the second electrodecorresponds to the memory cell. The structure in which the firstelectrodes are in common includes a structure in which the ferroelectriclayers are formed on predetermined regions of the first electrode andthe second electrodes are formed on the ferroelectric layers, and astructure in which the first electrodes are formed in predeterminedsurface regions of a wiring layer, the ferroelectric layers are formedon the first electrodes and the second electrodes are formed on theferroelectric layers, although the above structure shall not be limitedthereto.

For forming the ferroelectric layer, a ferroelectric thin film isformed, and in a step to come thereafter, the ferroelectric thin film ispatterned. In some cases, it is not required to pattern theferroelectric thin film. The ferroelectric thin film can be formed by amethod suitable for a material that is used to constitute theferroelectric thin film, such as an MOCVD method, a pulse laser abrasionmethod, a sputtering method, a sol-gel method, an MOD (metal organicdecomposition) method using a bismuth organic metal compound (bismuthalkoxide compound) having a bismuth-oxygen bond as a raw material, andan LSMCD (liquid source mist chemical deposition) method. Theferroelectric thin film can be patterned, for example, by an anisotropicion etching (RIE) method.

In the present invention, the material for constituting the firstelectrode and second electrode includes, for example, Ir, IrO_(2-X),Ir/IrO_(2-X), SrIrO₃, Ru, RUO_(2-X), SrRuO₃, Pt, Pt/IrO_(2-X),Pt/RUO_(2-X), Pd, a Pt/Ti stacked structure, a Pt/Ta stacked structure,a Pt/Ti/Ta stacked structure, La_(0.5)Sr_(0.5)CoO₃(LSCO), a Pt/LSCOstacked structure and YBa₂Cu₃O₇. The value of the above X is in therange of 0≦X<2. In the above stacked structures, a material describedbefore “/”, constitutes the upper layer, and a material described after“/” constitutes the lower layer. The first electrode and the secondelectrode may be constituted of one material, materials of the same kindor materials of different kinds. For forming the first electrode or thesecond electrode, a first electrode material layer or a second electrodematerial layer is formed, and in a step to come thereafter, the firstelectrode material layer or the second electrode material layer ispatterned. The first electrode material layer or the second electrodematerial layer can be formed by a method properly suitable for thematerials for constituting the first electrode material layer or thesecond electrode material layer, such as a sputtering method, a reactivesputtering method, an electron beam deposition method, an MOCVD methodand a pulse laser abrasion method. The first electrode material layer orthe second electrode material layer can be patterned, for example, by anion milling method or an RIE method.

In the ferroelectric-type nonvolatile semiconductor memory of thepresent invention, the material for constituting the insulating layerincludes silicon oxide (SiO₂), silicon nitride (SiN), SiON, SOG, NSG,BPSG, PSG, BSG and LTO.

The transistor for selection (transistor for switching) and varioustransistors can be constituted, for example, of a known MIS type FET ora MOS type FET. The material for constituting the bit line includes animpurity-doped polysilicon and a refractory metal material. The commonfirst electrode and the transistor for selection can be electricallyconnected through a contact hole made in the insulating layer formedbetween the common first electrode and the transistor for selection orthrough a contact hole made in the insulating layer and a wiring layerformed on the insulating layer. The differential sense amplifier can beconstituted of a known latch circuit.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of the first to fourth aspects of the present invention, areference potential having one potential is provided to the memory cellsbelonging to the same thermal history group, and a reference potentialhaving other potential is provided to the memory cells belonging toother thermal history group. Otherwise, a reference potential having onepotential is provided to the memory cells constituting the first andsecond sub-memory units of an n-th layer, and a reference potentialhaving other potential is provided to the memory cells constituting thefirst and second sub-memory units of a k-th layer (k≠n), so that optimumreference potentials can be provided to the bit line and that almost nodifference appears in the bit line potential that appears in the bitline, even if memory cell groups having different thermal histories withregard to their production processes are included. When the presentspecification simply expresses “thermal history”, it also means athermal history with regard to a production process, more specifically,crystallization heat treatment that is carried out for crystallizationof a ferroelectric thin film for forming a ferroelectric layer after theformation of the ferroelectric thin film.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of the fifth to seventh aspects of the present invention,complement data of 1 bit is stored in a pair of the memory cells. It isensured that such pairs of the memory cells belong to the same thermalhistory group with regard to their production processes, so that almostno change is caused in the bit line potential that appears in the bitline.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be explained on the basis of preferredembodiments with reference to drawings hereinafter.

FIG. 1 is a schematic partial cross-sectional view of one memory unitobtained when a ferroelectric-type nonvolatile semiconductor memory inExample 1 is cut through an imaginary vertical plane that is in parallelwith the extending direction of a bit line.

FIG. 2 is a conceptual circuit diagram of a ferroelectric-typenonvolatile semiconductor memory according to the second aspect of thepresent invention and in Example 1.

FIG. 3 is a more specific circuit diagram of the conceptual circuitdiagram shown in FIG. 2.

FIG. 4 is a conceptual circuit diagram of a ferroelectric-typenonvolatile semiconductor memory according to the second aspect of thepresent invention and in Example 2.

FIG. 5 is a conceptual circuit diagram of a variant of theferroelectric-type nonvolatile semiconductor memory according to thesecond aspect of the present invention and in Example 2.

FIG. 6 is a schematic partial cross-sectional view of one memory unitobtained when a ferroelectric-type nonvolatile semiconductor memory inExample 3 is cut through an imaginary vertical plane that is in parallelwith the extending direction of a bit line.

FIG. 7 is a conceptual circuit diagram of a ferroelectric-typenonvolatile semiconductor memory according to the third aspect of thepresent invention and in Example 3.

FIG. 8 is a more specific circuit diagram of the conceptual circuitdiagram shown in FIG. 7.

FIG. 9 is a conceptual circuit diagram of a variant of theferroelectric-type nonvolatile semiconductor memory according to thethird aspect of the present invention and in Example 3.

FIG. 10 is a conceptual circuit diagram of another variant of theferroelectric-type nonvolatile semiconductor memory according to thethird aspect of the present invention and in Example 3.

FIG. 11 is a schematic partial cross-sectional view of one memory unitobtained when a ferroelectric-type nonvolatile semiconductor memory inExample 4 is cut through an imaginary vertical plane that is in parallelwith the extending direction of a bit line.

FIG. 12 is a conceptual circuit diagram of another variant of theferroelectric-type nonvolatile semiconductor memory according to thethird aspect of the present invention and in Example 4.

FIG. 13 is a more specific circuit diagram of the conceptual circuitdiagram shown in FIG. 12.

FIG. 14 is a conceptual circuit diagram of a variant of theferroelectric-type nonvolatile semiconductor memory according to thethird aspect of the present invention and a variant of theferroelectric-type nonvolatile semiconductor memory in Example 4.

FIG. 15 is a circuit diagram of a gain-cell type ferroelectric-typenonvolatile semiconductor memory in Example 5.

FIG. 16 is a layout of the gain-cell type ferroelectric-type nonvolatilesemiconductor memory in Example 5.

FIG. 17 is a circuit diagram showing a kind of switching circuitprovided between bit lines when the predetermined potential of a wiringto which one end of a transistor for detection is connected in thegain-cell type ferroelectric-type nonvolatile semiconductor memory inExample 5.

FIGS. 18A and 18B are conceptual circuit diagrams of ferroelectric-typenonvolatile semiconductor memories in Example 6.

FIG. 19 is a more specific circuit diagram of the conceptual circuitdiagram shown in FIG. 18.

FIG. 20 is a conceptual circuit diagram of a ferroelectric-typenonvolatile semiconductor memory in Example 7.

FIG. 21 is a more specific circuit diagram of the conceptual circuitdiagram shown in FIG. 20.

FIGS. 22A and 22B are circuit diagrams of ferroelectric-type nonvolatilesemiconductor memories in Example 8.

FIG. 23 is a schematic partial cross-sectional view of one memory unit,obtained when a variant of the ferroelectric-type nonvolatilesemiconductor memory in Example 3 or 7 is cut through an imaginaryvertical plane that is in parallel with the extending direction of a bitline.

FIG. 24 is a circuit diagram of a variant of the ferroelectric-typenonvolatile semiconductor memory of Example 7 shown in FIG. 23.

FIG. 25 is a schematic partial cross-sectional view of one memory unit,obtained when another variant of the ferroelectric-type nonvolatilesemiconductor memory in Example 3 or 7 is cut through an imaginaryvertical plane that is in parallel with the extending direction of a bitline.

FIG. 26 is a diagram of P-E hysteresis loop of a ferroelectric material.

FIG. 27 is a circuit diagram of a ferroelectric-type nonvolatilesemiconductor memory disclosed in U.S. Pat. No. 4,873,664.

FIG. 28 is a circuit diagram of a ferroelectric-type nonvolatilesemiconductor memory disclosed in JP-A-9-121032.

DESCRIPTION OF THE PREFERRED EMBODIMENTS EXAMPLE 1

Example 1 is concerned with a ferroelectric-type nonvolatilesemiconductor memory (to be abbreviated as “nonvolatile memory”hereinafter) according to the first and second aspects of the presentinvention. FIG. 1 shows a schematic partial cross-sectional viewobtained when part of the nonvolatile memory of Example 1 is cut throughan imaginary vertical plane that is in parallel with the extendingdirection of a bit line. FIG. 2 shows a conceptual circuit diagram ofthe nonvolatile memory according to the second aspect of the presentinvention, and FIG. 3 shows a more specific circuit diagram of theconceptual circuit diagram of FIG. 2. While FIG. 1 shows a firstsub-memory unit, a second sub-memory unit also has a similar structure,and the second sub-memory unit is formed side by side with the firstsub-memory unit in the direction perpendicular to the paper surface ofFIG. 1. In explanations to be described hereinafter, the firstsub-memory unit alone will be explained in some cases.

The nonvolatile memory in Example 1 has a plurality of bit lines BL_(n)(n=1, 2 in Example 1), a plurality of memory cells MC_(1nm) and MC_(2nm)(m=1, 2, 3, 4). Each memory cell comprises a first electrode 21 or 31, aferroelectric layer 22 or 32 formed at least on the first electrode 21or 31, and a second electrode 23 or 33 formed on the ferroelectric layer22 or 32. A plurality of the memory cells MC_(11m) MC_(12m), MC_(21m)and MC_(22m) belong to one of two or more thermal history groups havingthermal histories from different production processes. Specifically, thememory cell MC_(11m) and the memory cell MC_(21m) belong to a firstthermal history group, and the memory cell MC_(12m) and the memory cellMC_(22m) belong to a second thermal history group. Data of 1 bit isstored in each of a pair of the memory cells (MC_(11m) and MC_(21m)) ora pair of the memory cells (MC_(12m) and MC_(22m)) connected to a pairof the bit lines BL_(n), and the pair of the bit lines BL_(n) areconnected to a differential sense amplifier SA. The differential senseamplifier SA can be constituted of a known latch circuit.

In a pair of the memory cells (for example, MC_(11m) and MC_(2m)), whendata stored in one memory cell (for example, MC_(11m)) is read out, areference potential is provided to the bit line BL₂ to which the othermemory cell (MC_(21m)) is connected, and when data stored in the othermemory cell (MC_(21m)) is read out, a reference potential is provided tothe bit line BL₁ to which the former memory cell (MC_(11m)) isconnected. And, a reference potential having the same potential isprovided to a bit line connected to the memory cells belonging to thesame thermal history group, and a reference potential having a differentpotential is provided to a bit line connected to the memory cellsbelonging to a different thermal history group. That is, when datastored in the memory cells MC_(11m) and MC_(21m), the same referencepotential V_(REF-1) is provided to the bit lines BL₂ and BL₁. When datastored in the memory cell MC_(12m) and MC_(22m) is read out, the samereference potential V_(REF-2) is provided to the bit lines BL₂ and BL₁.

The above nonvolatile memory has a structure in which the memory cellsare stacked through an insulating layer 26, and the memory cells formedon one insulating layer belong to a thermal history group different froma thermal history group of the memory cells formed on other insulatinglayer. That is, the memory cells MC_(11m) and MC_(21m) formed on aninsulating layer 16 belong to the thermal history group different fromthe thermal history group of the memory cells MC_(12m) and MC_(22m)formed on other insulating layer 26. Further, the memory cells formed onthe same insulating layer belong to the same thermal history group. Thatis, the memory cells MC_(11m) and MC_(21m) formed on the insulatinglayer 16 belong to one and the same thermal history group, and thememory cells MC_(12m) and MC_(22m) formed on the other insulating layer26 belong to the other and same thermal history group.

The nonvolatile memory in Example 1 comprises a first memory unit MU₁and a second memory unit MU₂.

The first memory unit MU₁ has;

-   -   (A-1) a first bit line BL₁,    -   (B-1) a first transistor for selection TR₁,    -   (C-1) first sub-memory units SMU₁₁ and SMU₁₂ which are N in        number (N≧2; 2 in Example 1) and each of which is composed of        memory cells MC_(11M) and MC_(12M) which are M in number (M≧2;        M=4 in Example 1), and    -   (D-1) plate lines which are M×N in number.

The second memory unit MU₂ has;

-   -   (A-2) a second bit line BL₂,    -   (B-2) a second transistor for selection TR₂,    -   (C-2) second sub-memory units SMU₂₁ and SMU₂₂ which are N in        number and each of which is composes of memory cells MC_(21M)        and MC_(22M) which are M in number, and    -   (D-2) the plate lines which are M×N in number and are shared        with the plate lines which are M×N in number and constitute said        first memory unit MU₁.

The first sub-memory unit of an n-th layer (n=1, 2 . . . N; n=1, 2 inExample 1) SMU_(1n) and the second sub-memory unit of the n-th layerSMU_(2n) are formed on the same insulating layer 16 or 26, and the firstsub-memory unit of an n′ layer (n′=2 . . . N; n′=2 in Example 1)SMU_(1n′) and the second sub-memory unit of the n′-th layer SMU_(2n′)are stacked on the first sub-memory unit of the (n′−1)-th layerSMU_(1(n′−1)) and the second sub-memory unit of the (n′−1)-th layerSMU_(2(n′−1)) through the insulating layer 26.

Each of the memory cells MC_(11m), MC_(21m) and MC_(12m), MC_(22m)comprises a first electrode 21 or 31, a ferroelectric layer 22 or 32 anda second electrode 23 or 33.

In the first memory unit MU₁, the first electrodes of the memory cellsconstituting the first sub-memory unit of the n-th layer are in commonwith the first sub-memory unit of the n-th layer, the common firstelectrode is connected to the first bit line BL₁ through the firsttransistor for selection TR₁, and the second electrode of the memorycell in an m-th-place (m=1, 2 . . . M ) is connected to the common plateline in the [(n−1)M+N]-th-place. Specifically, the first electrodes 21(which will be sometimes referred to as “common node CN₁₁”) of thememory cells MC_(11m) constituting the first sub-memory unit of thefirst layer SMU₁₁ are in common with the first sub-memory unit of thefirst layer SMU₁₁, the common first electrode 21 (common node CN₁₁) isconnected to the first bit line BL₁, through the first transistor forselection TR₁, and the second electrode 23 of the memory cell MC_(11m)in the m-th-place is connected to the common plate line in the[(n−1)M+n]-th-place. The first electrodes 31 (which will be sometimesreferred to as “common node CN₁₂”) of the memory cells MC_(12m)constituting the first sub-memory unit of the second layer SMU₁₂ are incommon with the first sub-memory unit of the second layer SMU₁₂, thecommon first electrode 31 (common node CN₁₂) is connected to the firstbit line BL₁ through the first transistor for selection TR₁, and thesecond electrode 33 of the memory cell MC_(12m) in the m-th-place isconnected to the common plate line in the [(n−1)M+m]-th-place. The plateline PL_((n−1)M+m) is also connected to the second electrodes 23 and 33of the memory cells constituting the memory unit MU₂. In Example 1, morespecifically, the plate lines extend from the second electrodes 23 and33.

In the second memory unit MU₂, the first electrodes of the memory cellsconstituting the second sub-memory unit of the n-th layer are in commonwith the second sub-memory unit of the n-th layer, the common firstelectrode is connected to the second transistor for selection throughthe second bit line, and the second electrode of the memory cell in them-th-place is connected to the common plate line in the[(n−1)M+m]-th-place. Specifically, the first electrodes 21 (which willbe sometimes referred to as “common node CN₂₁”) of the memory cellsMC_(21m) constituting the second sub-memory unit of the first layerSMU₂₁ are in common with the second sub-memory unit of the first layerSMU₂₁, the common first electrode 21 (common node CN₂₁) is connected tothe second bit line BL₂ through the second transistor for selection TR₂,and the second electrode 23 of the memory cell MC_(21m) in them-th-place is connected to the common plate line in the[(n−1)M+m]-th-place. The first electrodes 31 (which will be sometimesreferred to as “common node CN₂₂”) of the memory cells MC_(22m)constituting the second sub-memory unit of the second layer SMU₂₂ are incommon with the second sub-memory unit of the second layer SMU₂₂, thecommon first electrode 31 (common node CN₂₂) is connected to the secondbit line BL₂ through the second transistor for selection TR₂, and thesecond electrode 33 of the memory cell MC_(22m) in the m-th-place isconnected to the common plate line in the [(n−1)M+m]-th-place.

The memory cells MC_(1nm) constituting the first sub-memory unit of then-th layer SMU_(1n) and the memory cells MC_(2nm) constituting thesecond sub-memory unit of the n-th layer SMU_(2n) have the same thermalhistory with regard to their production processes, and the memory cellsMC_(1nm) constituting the first sub-memory unit of the n-th layerSMU_(1n) and the memory cells MC_(2n) constituting the second sub-memoryunit of the n-th layer SMU_(2n) have a thermal history different from athermal history of the memory cells MC_(1km) constituting the firstsub-memory unit of a k-th layer (k≠n) and the memory cells MC_(2km)constituting the second sub-memory unit of the k-th layer SMU_(2k).

The memory cell MC_(1nm) in the m-th-place constituting the firstsub-memory unit of the n-th layer SMU_(1n) in the first memory unit MU₁and the memory cell MC_(2nm) in the m-th-place constituting the secondsub-memory unit of the n-th layer SMU_(2n) in the second memory unit MU₂form a pair to store data of 1 bit each. When data stored in the memorycell MC_(1nm) constituting the first sub-memory unit of the n-th layerSMU_(1n) in the first memory unit MU₁ is read out, a reference potentialV_(REF-n) having an n-th potential is provided to the second bit lineBL₂. When data stored in the memory cell MC_(2nm) constituting thesecond sub-memory unit of the n-th layer SMU_(2n) in the second memoryunit MU₂ is read out, the reference potential V_(REF-n) having the n-thpotential is provided to the first bit line BL₁. The n-th potentialdiffers from the k-th potential (k≠n).

The other source/drain region 14B of the first transistor for selectionTR₁ is connected to the first bit line BL₁ through a contact hole 15,and one source/drain region 14A of the first transistor for selectionTR₁ is connected to the common first electrode 21 (first common nodeCN₁₁) in the first sub-memory unit of the first layer SMU₁₁ through acontact hole 18 (which will be referred to as “contact hole 18 of thefirst layer”) made in the insulating layer 16. One source/drain region14A of the first transistor for selection TR₁ is connected to the commonfirst electrode 31 (second common node CN₁₂) in the first sub-memoryunit of the second layer SMU₁₂ through the contact hole 18 of the firstlayer made in the insulating layer 16 and a contact hole 28 (which willbe referred to as “contact hole of the second layer”) made in theinsulating layer 26. In the drawings, reference numeral 36A indicates aninsulation layer.

The bit lines BL₁ and BL₂ are connected to the differential senseamplifier SA. The plate line PL_((n−1)M+m) is connected to a plate linedecoder/driver PD. The word lines WL₁ and WL₂ are connected to a wordline decoder/driver WD. The word lines WL₁ and WL₂ extend in thedirection perpendicular to the paper surface of FIG. 1. The secondelectrode 23 of the memory cell MC_(11m) constituting the firstsub-memory unit SMU₁₁ is shared with the second electrode of the memorycell MC_(21m) constituting the second sub-memory unit SMU₂₁ contiguousin the direction perpendicular to the paper surface of FIG. 1, andfurther, it also works as a plate line PL_((n−1)M+m). The secondelectrode 33 of the memory cell MC_(12m) constituting the firstsub-memory unit SMU₁₂ is shared with the second electrode of the memorycell MC_(21m) constituting the second sub-memory unit SMU₂₂ contiguousin the direction perpendicular to the paper surface of FIG. 1, andfurther, it also works as a plate line PL_((n−1)M+m).

The circuit for providing the reference potential V_(REF-n) (V_(REF-1),V_(REF-2)) is constituted of first and second reference capacitors RC₁and RC₂ (see FIGS. 2 and 3). These reference capacitors RC₁ and RC₂ areformed, for example, of MOS capacitors. By optimizing the area of theMOS capacitors, the optimum reference potentials V_(REF-1) and V_(REF-2)can be outputted from the MOS capacitors. The first reference capacitorRC₁ is connected to the first bit line BL₁ and the second bit line BL₂with a switching circuit SW₁₁ and a switching circuit SW₂₁ (formed, forexample, of MOS FETS), and the second reference capacitor RC₂ isconnected to the first bit line BL₁ and the second bit line BL₂ with aswitching circuit SW₁₂ and a switching circuit SW₂₂ (formed, forexample, of MOS FETs). FIG. 1 omits showing of the first and secondreference capacitors RC₁ and RC₂ and the switching circuits SW₁₁ toSW₂₂.

The reference potential may be outputted from a known voltage downconverter or a structure in which a plurality of PMOS type FETs areconnected in series.

The first transistor for selection TR₁ constituting the first memoryunit MU₁ is connected to the word line WL₁, and the second transistorfor selection TR₂ constituting the second memory unit MU₂ is connectedto the word line WL₂. The memory cells MC_(1nm) and MC_(2nm) areindependently controlled. In an actual nonvolatile memory, sets of suchmemory units for storing 2×N×M bits (specifically 16 bits) each arearranged in the form of an array as access units. The value of M is notlimited to 4. The value of M can be any value so long as it satisfiesM≧2, and examples of the value of M in actual embodiments includeexponents of 2 (2, 4, 8, 16 . . . ). Further, the value of N can be anyvalue so long as it satisfies N≧2, and examples of the value of N inactual embodiment include exponents of 2 (2, 4, 8, . . . ).

A pair of the transistors for selection TR₁ and TR₂ in the nonvolatilememory occupy a region surrounded by the word line WL and a pair of thebit lines BL₁ and BL₂. If the word lines and the bit lines are arrangedat a smallest pitch, therefore, the pair of the transistors forselection TR₁ and TR₂ in the nonvolatile memory have a minimum area of8F². However, a pair of the transistors for selection TR₁ and TR₂ areshared by an M sets of the memory cells MC_(11m), MC_(12m), MC_(21m) andMC_(22m) (m=1, 2 . . . M), so that the number of the transistors forselection TR₁ and TR₂ per bit can be decreased. Further, since the wordlines are arranged moderately, the nonvolatile memory can be easilydecreased in size. Moreover, concerning peripheral circuits, 2×M bitscan be selected with one word line decoder/driver WD and the plate linedecoder/drivers PD which are M in number. By employing the aboveconstitution, a layout in which the cell area is close to 8F² can bematerialized, and a chip size equal to the size of DRAM can be realized.

When data stored in a memory cell is read out, a charge is accumulatedin the first and second reference capacitors RC₁ and RC₂ in advance.Alternatively, when data stored in the memory cell constituting thefirst memory unit MU₁ is read out, a charge may be accumulated in thesecond reference capacitor RC₂ in advance, and when data stored in thememory cell constituting the second memory unit MU₂ is read out, acharge may be accumulated in the first reference capacitor RC₁ inadvance. When the reference capacitors formed of a MOS capacitor eachare used in Examples 3 to 5 to be described later, the same operation isalso carried out.

When data stored in the memory cell MC_(11p) (p is one of 1, 2, 3 and 4)constituting the first sub-memory unit SMU₁₁ is read out, the word lineWL₁ is selected, and in a state where a voltage of (½)V_(cc) is appliedto the plate lines connected to the memory cells other than the memorycell MC_(11p), the plate line connected to the memory cell MC_(11p) isdriven. The above V_(cc) refers, for example, to a power source voltage.By the above operation, a potential corresponding to data of 1 bitstored in the memory cell MC_(11p) appears in the first bit line BL₁ asa bit line potential through the first transistor for selection TR₁.And, the switching circuit SW₂₁ is brought into an ON-state. By theabove operation, the reference potential V_(REF-1) appears in the secondbit line BL₂ as a bit line potential. And, the voltages (bit linepotentials) in a pair of the bit lines BL₁ and BL₂ are detected with thedifferential sense amplifier SA.

For example, when data stored in the memory cell MC_(22p) constitutingthe second sub-memory unit SMU₂₂ is read out, the word line WL₂ isselected, and in a state where a voltage, for example, of (½)V_(cc) isapplied to the plate lines connected to the memory cells other than thememory cell MC_(22p), the plate line connected to the memory cellMC_(22p) is driven. By this operation, a potential corresponding to dataof 1 bit stored in the memory cell MC_(22p) appears in the second bitline BL₂ as a bit line voltage through the second transistor forselection TR₂. And, the switching circuit SW₁₂ is brought into anON-state. By the above operation, the reference potential V_(REF-2)appears in the first bit line BL₁ as a bit line potential. And, voltages(bit line potentials) in a pair of the bit lines BL₁ and BL₂ aredetected with the differential sense amplifier SA.

The outline of the production method of the nonvolatile memory inExample 1 will be explained below.

[Step-100]

First, MOS type transistors that are to work as the transistors forselection and the transistors constituting the switching circuits SW₁₁to SW₂₂ in the nonvolatile memory are formed in a semiconductorsubstrate 10. For this purpose, for example, a device isolation region11 having a LOCOS structure is formed by a known method. The deviceisolation region may have a trench structure or may have a combinationof a LOCOS structure and a trench structure. Then, the surface of thesemiconductor substrate 10 is oxidized, for example, by a pyrogenicmethod, to form a gate insulating layer 12. Then, a polysilicon layerdoped with an impurity is formed on the entire surface by a CVD method,and patterned to form a gate electrode 13. The gate electrode 13 alsoworks as a word line. The gate electrode 13 may be formed of polycide ormetal silicide in place of the polysilicon layer. Then, thesemiconductor substrate 10 is ion-implanted, to form an LDD structure.Then, an SiO₂ layer is formed on the entire surface by a CVD method, andthe SiO₂ layer is etched back, to form a gate-sidewalls (not shown) onthe side walls of the gate electrode 13. Then, the semiconductorsubstrate 10 is ion-implanted, and then the impurity introduced by theion-implantation is activated by annealing, to form the source/drainregions 14A and 14B. During the above steps, the reference capacitorsRC₁ and RC₂ (not shown in FIG. 1) made of MOS capacitors are formed. Oneelectrode of each of the reference capacitors RC₁ and RC₂ is connectedto a power source (not shown). One source/drain region of eachtransistor constituting the switching circuits SW₁₁ to SW₂₂ correspondto the other electrode of each of the reference capacitors RC₁ and RC₂.

[Step-110]

Then, an insulating layer is formed on the entire surface. Specifically,a lower insulating layer (thickness 1 μm) having an SiO₂ and SiN stackedstructure is formed by a CVD method, and the thus-formed lowerinsulating layer is flattened by a CMP method, to form a 0.6 μm thicklower insulating layer. Then, opening portions are formed through thelower insulating layer above the other source/drain region 14B and theother source/drain region of each of the transistors constituting theswitching circuits SW₁₁ to SW₂₂ by an RIE method. Then, a polysiliconlayer doped with an impurity is formed on the lower insulating layer andthe insides of the opening portions by a CVD method. The polysiliconlayer is annealed at 850° C. for 30 minutes to activate the impuritycontained in the polysilicon layer, whereby a contact hole 15 isobtained. Then, the polysilicon layer on the lower insulating layer ispatterned to form the bit line BL₁ and a wiring (not shown) forconnecting the bit line BL₁ and the transistors constituting theswitching circuits SW₁₁ to SW₂₂. Then, an upper insulating layer made ofSiO₂ (thickness 0.4 μm) is formed on the entire surface by a CVD method,and the thus-formed upper insulating layer is flattened by a CMP methodto form a 0.2 μm thick upper insulating layer. The upper insulatinglayer and the upper insulating layer will be collectively referred to asan insulating layer 16. The above bit line BL₁ is formed so as not tofor a short circuit to a contact hole 18 to be formed at a later step.

Then, an opening portion 17 is formed through the insulating layer 16above one source/drain region 14A by an RIE method, and then the openingportion 17 is filled with polysilicon doped with an impurity, tocomplete a contact hole 18. The contact hole 18 can be also formed byfilling the opening portion 17 made through the insulating layer 16, forexample, with a metal wiring material including a refractory metal andmetal silicide such as tungsten, Ti, Pt, Pd, Cu, TiW, TiNW, WSi₂ andMoSi₂. The top surface of the contact hole 18 may be nearly at the samelevel as the level of the surface of the insulating layer 16, or the topportion of the contact hole 18 may be extending on the surface of theinsulating layer 16. Table 2 below shows conditions of forming thecontact hole 18 by filling the opening portion 17 with tungsten. Beforefiling the opening portion 17 with tungsten, preferably, a Ti layer anda TiN layer (not shown) are consecutively formed on the insulating layer16 and inside the opening portion 17 by magnetron sputtering methods.The reason for forming the Ti layer and the TiN layer is that an ohmiclow contact resistance is obtained, that damage that may be caused onthe semiconductor substrate 10 by a blanket tungsten CVD method isprevented, and that the adhesion of tungsten is improved. TABLE 2Sputtering condition for Ti layer (thickness: 20 nm) Process gas Ar = 35sccm Pressure 0.52 Pa RF power   2 kW Heating of substrate No Sputteringcondition for Ti layer (thickness: 100 nm) Process gas N₂/Ar = 100/35sccm Pressure  1.0 Pa RF power   6 kW Heating of substrate No TungstenCVD formation condition Source gas WF₆/H₂/Ar = 40/400/2250 sccm Pressure10.7 Pa Forming temperature 450° C. Etching conditions of tungstenlayer, TiN layer and Ti layer Etching on first stage: Etching oftungsten layer Source gas SF₆/Ar/He = 110:90:5 sccm Pressure   46 Pa RFpower  275 W Etching on second stage: Etching of TiN layer and Ti layerSource gas Ar/Cl₂ = 75/5 sccm Pressure  6.5 Pa RF power  250 W[Step-120]

Then, desirably, an adhesion layer (not shown) made of TiN is formed onthe insulating layer 16. Then, a first electrode material layer of Irfor forming the first electrode (lower electrode) 21 is formed on theadhesion layer, for example, by a sputtering method, and the firstelectrode material layer and the adhesion layer are patterned byphotolithography and a dry etching method, whereby the first electrode21 can be obtained. In steps to be described later, desirably, anadhesion layer is formed on an insulating layer before a first electrodematerial layer is formed.

The first electrode 21 may have a so-called damascene structure. Thatis, the first electrode 21 may have a structure in which a circumferencethereof is filled with an insulating layer. The ferroelectric layer canbe therefore formed on a flat substratum, i.e., on the first electrodeand the insulating layer, so that the layers can be flattened and thatmulti-layered memory cells or sub-memory units can be more easilyformed. The top surface of the above insulating layer and the topsurface of the first electrode 21 may be at the same level. Otherwise,the top surface of the first electrode may be at a level higher or lowerthan the level of the above insulating layer.

[Step-130]

Then, a ferroelectric thin film made of a Bi-containing layer-structuredperovskite type ferroelectric material (specifically, Bi₂SrTa₂O₉ havinga crystallization temperature of 750° C.) is formed on the entiresurface, for example, by an MOCVD method. The ferroelectric thin film isthen dried in air at 250° C. and then heat-treated in an oxygenatmosphere at 750° C. for 1 hour, to promote crystallization.

[Step-140]

Then, an IrO_(2-X) layer and a Pt layer are consecutively formed on theentire surface by sputtering methods, and then the Pt layer, theIrO_(2-X) thin film and the Bi₂SrTa₂O₉ thin film are consecutivelypatterned by photolithography and dry etching methods, to form thesecond electrode 23 and the ferroelectric layer 22. If the etchingdamages the ferroelectric layer 22, the ferroelectric layer 22 can beheat-treated at a temperature necessary for restoration from the damage.

[Step-150]

The above step is then followed by

-   -   the formation of the insulating layer 26 and flattening thereof,    -   the formation of the opening portion 27 and the formation of the        contact hole 28,    -   the formation of the first electrode 31, the ferroelectric layer        32 made of Bi₂Sr(Ta_(1.5)Nb_(0.5))O₉ having a crystallization        temperature of 700° C. and the second electrode 33, and    -   the formation of the insulation layer 36A.

The heat treatment of the ferroelectric layer 32 made ofBi₂Sr(Ta_(0.5)Nb_(0.5))O₉ having a crystallization temperature of 700°C. can be carried out in an oxygen gas atmosphere at 700° C. for 1 hourfor promoting the crystallization thereof. Alternatively, theferroelectric layer 32 may be constituted of the same ferroelectricmaterial as that used for constituting the ferroelectric layer 22.

Alternatively, the second electrodes may be those which do not work asplate lines. In this case, after completion of the insulation layer 36A,the second electrode 23 and the second electrode 33 are connectedthrough a contact hole (viahole) and the plate lines connected to thecontact hole are formed on the insulation layer 36A.

The memory cells MC_(11M) constituting the first sub-memory unit SMU₁₁formed on the insulating layer 16 and the memory cells MC_(21M)constituting the second sub-memory unit SMU₂₁ formed on the insulatinglayer 16 undergo the same thermal history with regard to theirproduction processes. That is, they undergo crystallization heattreatment for crystallization of the ferroelectric layers 22. The memorycells MC_(12M) constituting the first sub-memory unit SMU₁₂ formed onthe insulating layer 26 and the memory cells MC_(22M) constituting thesecond sub-memory unit SMU₂₂ formed on the insulating layer 26 undergothe same thermal history with regard to their production processes. Thatis, they undergo crystallization heat treatment for crystallization ofthe ferroelectric layers 32. However, the memory cells constituting thefirst and second sub-memory units of the n-th layer are provided withthe reference potential different from the reference potential providedto the memory cells constituting the first and second sub-memory unitsof the k-th layer (k≠n), so that optimum reference potentials can beprovided to the bit lines even if memory cell groups having differentthermal histories with regard to their production processes areincluded, and that there is caused almost no difference in bit linepotentials that appear in the bit lines.

The following Table 3 shows a condition of forming a ferroelectric thinfilm made, for example, of Bi₂SrTa₂O₉. In Table 3, “thd” stands fortetramethylheptanedionate. Further, source materials shown in Table 3are in the form of a solution thereof in a solvent containingtetrahydrofuran (THF) as a main component. TABLE 3 Formation by MOCVDmethod Source materials Sr(thd)₂-tetraglyme Bi(C₆H₅)₃ Ta(O-iC₃H₇)₄(thd)Forming temperature 400-700° C. Process gas Ar/O₂ = 1000/1000 cm³Forming rate 5-20 nm/minute

Alternatively, a ferroelectric thin film made of Bi₂SrTa₂O₉ can beformed on the entire surface by a pulse laser abrasion method, a sol-gelmethod or an RF sputtering method as well. Examples of formingconditions in these cases are shown below. When the ferroelectric thinfilm having a large thickness is formed by a sol-gel method, spincoating and drying can be repeated as required, or spin coating andcalcining (or annealing) can be repeated as required. TABLE 4 Formationby pulse laser abrasion method Target Bi₂SrTa₂O₉ Laser used KrF Excimerlaser (wavelength 248 nm, pulse width 25 nanoseconds, 5 Hz) Formingtemperature 400-800° C. Oxygen concentration 3 Pa

TABLE 5 Formation by sol-gel method Source materialsBi(CH₃(CH₂)₃CH(C₂H₅)COO)₃ [Bismuth.2-ethylhexanoic acid, Bi(OOc)₃]Sr(CH₃(CH₂)₃CH(C₂H₅)COO)₂ [Strontium.2-ethylhexanoic acid, Sr(OOc)₂]Ta(OEt)₅ [Tantalum ethoxide] Spin coating 3000 rpm × 20 secondscondition Drying   250° C. × 7 minutes Calcining 700-800° C. × 1 hour(RTA treatment added as required)

TABLE 6 Formation by RF sputtering method Target Bi₂SrTa₂O₉ ceramictarget RF power 1.2 W-2.0 W/target 1 cm² Ambient pressure 0.2-1.3 PaForming temperature Room temperature - 600° C. Process gas Ar/O₂ flowrate = 2/1-9/1

The following Table 7 shows a condition of forming PZT or PLZT when aferroelectric layer is formed of PZT or PLZT by a magnetron sputteringmethod. Otherwise, PZT or PLZT can be formed by a reactive sputteringmethod, an electron beam deposition method, a sol-gel method or an MOCVDmethod. TABLE 7 Target PZT or PLZT Process gas Ar/O₂ = 90 vol %/10 vol %Pressure  4 Pa Power 50 W Forming temperature 500° C.

PZT or PLZT can be formed by a pulse laser abrasion method as well.Table 8 shows a forming condition in this case. TABLE 8 Target PZT orPLZT Laser used KrF Excimer laser (wavelength 248 nm, pulse width 25nanoseconds, 3 Hz) Output energy   400 mJ (1.1 J/cm²) Formingtemperature 550-600° C. Oxygen concentration 40-120 Pa

EXAMPLE 2

Example 2 is a variant of Example 1. In Example 1, the circuit forproviding the reference potentials V_(REF-1) and V_(REF-2) isconstituted of the first and second reference capacitors RC₁ and RC₂formed of MOS capacitors. In Example 2, the circuit for providing thereference potential V_(REF-1) is constituted of first referencecapacitors RC_(A1) and RC_(B1) made of a ferroelectric capacitor each,and the circuit for providing the reference potential V_(REF-2) isconstituted of second reference capacitors RC_(A2) and RC_(B2) made of aferroelectric capacitor each.

FIG. 4 shows a conceptual circuit diagram of the nonvolatile memory inExample 2. A more specific circuit diagram of the conceptual circuitdiagram shown in FIG. 4 can be the same as the circuit diagram shown inFIG. 3 except for portions of the reference capacitors RC_(A1), RC_(B1),RC_(A2) and RC_(B2) made of a ferroelectric capacitor each, so thatshowing thereof is omitted.

The first and second reference capacitors RC_(A1), RC_(B1), RC_(A2) andRC_(B2) have substantially the same structure as that of the memorycells. That is, each of the first reference capacitors RC_(A1) andRC_(B1) comprises a first electrode formed on the insulating layer 16, aferroelectric layer and a second electrode. Each of the second referencecapacitors RC_(A2) and RC_(B2) comprises a first electrode formed on theinsulating layer 26, a ferroelectric layer and a second electrode. Thenonvolatile memory in Example 2 can be produced in the same manner as inthe production of the nonvolatile memory in Example 1 except that no MOScapacitors are formed in [Step-100] in Example 1, that the firstreference capacitors RC_(A1) and RC_(B1) are formed concurrently withthe memory cells MC_(11m) and MC_(21m), and that the second referencecapacitors RC_(A2) and RC_(B2) are formed concurrently with the memorycells MC_(12m) and MC_(22m), so that a detailed explanation thereof isomitted.

The first electrode constituting the first reference capacitor RC_(A1)formed of a ferroelectric capacitor is connected to the first bit lineBL₁ through a switching circuit SW_(A11) and further is grounded througha switching circuit SW_(A12). Alternatively, the first electrode may beconnected to a reference-plate-line driver RPD through a switchingcircuit. This is also applicable in reference capacitors to be explainedbelow. The first electrode constituting the second reference capacitorRC_(A2) formed of a ferroelectric capacitor is connected to the firstbit line BL₁ through a switching circuit SW_(A21) and further isgrounded through a switching circuit SW_(A22). The first electrodeconstituting the first reference capacitor RC_(B1) formed of aferroelectric capacitor is connected to the second bit line BL₂ througha switching circuit SW_(B11), and further is grounded through aswitching circuit SW_(B12). The first electrode constituting the secondreference capacitor RC_(B2) formed of a ferroelectric capacitor isconnected to the second bit line BL₂ through a switching circuitSW_(B21), and further is grounded through a switching circuit SWB₂₂. Thesecond electrodes constituting the reference capacitors RC_(A1),RC_(B1), RC_(A2) and RC_(B2) are connected to reference-plate linesPL_(REF-A1), PL_(REF-A2), PL_(REF-B1) and PL_(REF-B2), respectively, andthese reference-plate lines are connected to a reference-plate-linedriver RPD. The areas of the first reference capacitors RC_(A1) andRC_(B1) and the second reference capacitors RC_(A2) and RC_(B2) areoptimized, whereby optimum reference potentials V_(REF-1) and V_(REF-2)can be outputted from the reference capacitors RC_(A1), RC_(B1), RC_(A2)and RC_(B2).

When data is read out from the memory cell, the switching circuitsSW_(A12), SW_(A22), SW_(B12) and SW_(B22) are brought into an ON-statein advance, the first electrodes constituting the reference capacitorsRC_(A11) RC_(A2), RC_(B1) and RC_(B2) are grounded, and predeterminedpotentials are provided to the reference-plate lines PL_(REF-A1),PL_(REF-A2), PL_(REF-B1) and PL_(REF-B2) from the reference-plate-linedriver RPD. As a result, charges are accumulated in the ferroelectriclayers constituting the reference capacitors RC_(A1), RC_(A2), RC_(B1),and RC_(B2). The accumulated charge amount is defined by the areas ofthe first reference capacitors RC_(A1) and RC_(B1) and the secondreference capacitors RC_(A2) and RC_(B2).

When data stored, for example, in the memory cell MC_(11p) (p is one of1, 2, 3 and 4) constituting the first sub-memory unit SMU₁₁ is read out,the word line WL₁ is selected, and in a state where a voltage, forexample, of (½)_(Vcc) is applied to the plate lines connected to thememory cells other than the memory cell MC_(11p), the plate line towhich the memory cell MC_(11p) is connected is driven. By the aboveoperation, a potential corresponding to data of 1 bit stored in thememory cell MC_(11p) appears in the first bit line BL₁ as a bit linepotential through the first transistor for selection TR₁. And, in astate where a proper electric field is applied to the ferroelectriclayer of the reference capacitor RC_(B1) from the second electrodethereof, the switching circuit SW_(B11) is brought into an ON-state. Bythe above operation, the reference potential V_(REF-1) based on theamount of charge accumulated in the first reference capacitor RC_(B1)appears in the second bit line BL₂ as a bit line potential. And, thevoltages (bit line potentials) in the bit lines BL₁ and BL₂ forming apair are detected with the differential sense amplifier SA.

When data stored, for example, in the memory cell MC_(22p) constitutingthe second sub-memory unit SMU₂₂ is read out, the word line WL₂ isselected, and in a state where a voltage, for example, of (½)_(Vcc) isapplied to the plate lines connected to the memory cells other than thememory cell MC_(22p), the plate line to which the memory cell MC_(22p)is connected is driven. By the above operation, a potentialcorresponding to data of 1 bit stored in the memory cell MC_(22p)appears in the second bit line BL₂ as a bit line potential through thesecond transistor for selection TR₂. And, in a state where a properelectric field is applied to the ferroelectric layer of the referencecapacitor RC_(A2) from the second electrode thereof, the switchingcircuit SW_(A21) is brought into an ON-state. By the above operation, areference potential V_(REF-2) based on the amount of charge accumulatedin the second reference capacitor RC_(A2) appears in the first bit lineBL₁ as a bit line potential. And, the voltages (bit line potentials) inthe bit lines BL₁ and BL₂ forming a pair are detected with thedifferential sense amplifier SA.

As a circuit diagram is shown in FIG. 5, the circuit for providing thereference potential V_(REF-1) may be constituted of a first referencecapacitor RC_(A) formed of a ferroelectric capacitor, and the circuitfor providing the reference potential V_(REF-2) may be constituted of asecond reference capacitor RC_(B) formed of a ferroelectric capacitor.In this case, the first electrode constituting the first referencecapacitor RC_(A) formed of a ferroelectric capacitor is connected to thefirst bit line BL₁ through the switching circuit SW_(A11), is connectedto the second bit line BL₂ through the switching circuit SW_(A21), andfurther, is grounded through the switching circuit SW_(A12). The firstelectrode constituting the second reference capacitor RC_(B) formed of aferroelectric capacitor is connected to the first bit line BL₁ throughthe switching circuit SW_(B11), is connected to the second bit line BL₂through the switching circuit SW_(B21), and further, is grounded throughthe switching circuit SW_(B12). The second electrodes constituting thereference capacitors RC_(A) and RC_(B) are connected to thereference-plate lines PL_(REF-A) and PL_(REF-B), respectively, and thesereference-plate lines are connected to the reference-plate-line driverRPD. The areas of the reference capacitors RC_(A) and RC_(B) areoptimized, whereby the optimum reference potentials V_(REF-1) andV_(REF-2) can be outputted from the reference capacitors RC_(A) and RCB.

EXAMPLE 3

Example 3 is concerned with the nonvolatile memory according to thefirst and third aspects of the present invention. FIG. 6 shows aschematic partial cross-sectional view of the nonvolatile memory ofExample 3 taken by cutting part of the nonvolatile memory through animaginary perpendicular plane in parallel with the extending directionof a bit line. FIG. 7 shows a conceptual circuit diagram of thenonvolatile memory according to the third aspect of the presentinvention, and FIG. 8 shows a more specific circuit diagram of theconceptual circuit diagram of FIG. 7. While a first sub-memory unit isshown in FIG. 6, a second sub-memory unit also has a similar structureand the second sub-memory unit is formed side by side with the firstsub-memory unit in the direction perpendicular to the paper surface ofFIG. 6. The following explanation addresses the first sub-memory unitalone in some cases. FIG. 8 omits showing of a circuit for generating areference potential and a differential sense amplifier.

The nonvolatile memory in Example 3 comprises a first memory unit MU₁and a second memory unit MU₂.

The first memory unit MU₁ has;

-   -   (A-1) a first bit line BL₁,    -   (B-1) first transistors for selection TR_(1N) which are N in        number (N≧2; N=2 in Example 3),    -   (C-1) first sub-memory units SMU_(1N) which are N in number and        each of which is composed of memory cells MC_(11M) and MC_(12M)        which are M in number (M≧2; M=4 in Example 3), and    -   (D-1) plate lines PL_(M) which are M in number and each of which        is shared with each memory cell constituting each of the first        sub-memory units SMU_(1N) which are N in number, between or        among the first sub-memory units which are N in number.

The second memory unit has;

-   -   (A-2) a second bit line BL₂,    -   (B-2) second transistors for selection TR_(2N) which are N in        number,    -   (C-2) second sub-memory units SMU_(2N) which are N in number and        each of which is composed of memory cells MC_(21M) and MC_(22M)        which are M in number, and    -   (D-2) the plate lines PL_(M) which are M in number, each of        which is shared with each memory cell constituting each of the        second sum-memory units which are N in number, between or among        the second sub-memory units which are N in number, and which are        shared with the plate lines which are M in number and constitute        said first memory unit.

The first sub-memory unit of an n-th layer (n=1, 2 . . . N) SMU_(1n) andthe second sub-memory unit of the n-th layer SMU_(2n) are formed on thesame insulating layer 16 or 26, and the first sub-memory unit of ann′-th layer (n′=2 . . . N) SMU_(1n′) and the second sub-memory unit ofthe n′-th layer SMU_(2n′) are stacked on the first sub-memory unit ofthe (n′−1)-th layer SMU_(1(n′−1)) and the second sub-memory unit of the(n′−1)-th layer SMU_(2(n′−1)) through the insulating layer 26.

Each of the memory cells MC_(11m) and MC_(21m) and the memory cellsMC_(12m) and MC_(22m) comprises a first electrode 21 or 31, aferroelectric layer 22 or 32 and a second electrode 23 or 33.

In the first memory unit MU₁, the first electrodes of the memory cellsMC_(1nm) constituting the first sub-memory unit of the n-th layerSMU_(1n) are in common with the first sub-memory unit of the n-th layerSMU_(1n), the common first electrode is connected to the first bit lineBL₁ through the n-th-place first transistor for selection TR_(1n), andthe second electrode of the memory cell MC_(1nm) in the m-th-place (m=1,2 . . . M) is connected to the common plate line P_(m) in them-th-place. Specifically, the first electrodes 21 (which will besometimes referred to as “common node CN₁₁”) of the memory cellsMC_(11m) constituting the first sub-memory unit of the first layer SMU₁₁are in common with the first sub-memory unit of the first layer SMU₁₁,the common first electrode 21 (common node CN₁₁) is connected to thefirst bit line BL₁ through the first-place first transistor forselection TR₁₁, and the second electrode 21 of the memory cell MC_(11m)in the m-th-place is connected to the common plate line PL_(m) in them-th-place. The first electrodes 31 (which will be sometimes referred toas “common node CN₁₂”) of the memory cells MC_(12m) constituting thefirst sub-memory unit of the second layer SMU₁₂ are in common with thefirst sub-memory unit of the second layer SMU₁₂, the common firstelectrode 31 (common node CN₁₂) is connected to the first bit line BL₁through the second-place first transistor for selection TR₁₂, and thesecond electrode 33 of the memory cell MC_(12m) in the m-th-place isconnected to the common plate line PL_(m) in the m-th-place. The plateline PL_(m) is also connected to the second electrodes 23 and 33 of thememory cells constituting the second memory unit MU₂. In Example 3, morespecifically, the plate lines are extending from the second electrodes23 and 33. The plate lines PL_(m) are inter-connected in a region notshown.

In the second memory unit MU₂, the first electrodes of the memory cellsMC_(2nm) constituting the second sub-memory unit of an n-th layerSMU_(2n) are in common with the second sub-memory unit of the n-th layerSMU_(2n), the common first electrode is connected to the second bit lineBL₂ through an n-th-place second transistor for selection TR_(2n), andthe second electrode of the memory cell MC₂ in the m-th-place isconnected to the common plate line PL_(m) in the m-th-place.Specifically, the first electrodes 21 (which will be sometimes referredto as “common node CN₂₁”) of the memory cells MC_(21m) constituting thesecond sub-memory unit of the first layer SMU₂₁ are in common with thesecond sub-memory unit of the first layer SMU₂₁, the common firstelectrode 21 (common node CN₂₁) is connected to the second bit line BL₂through the first-place second transistor for selection TR₂₁, and thesecond electrode 23 of the memory cell MC_(21m) in the m-th-place isconnected to the common plate line PL_(m) in the m-th-place. The firstelectrodes 31 (which will be sometimes referred to as “common nodeCN₂₂”) of the memory cells MC_(22m) constituting the second sub-memoryunit of the second layer SMU₂₂ are in common with the second sub-memoryunit of the second layer SMU₂₂, the common first electrode 31 (commonnode CN₂₂) is connected to the second bit line BL₂ through thesecond-place second transistor for selection TR₂₂, and the secondelectrode 33 of the memory cell MC_(22m) in the m-th-place is connectedto the common plate line in the m-th-place.

The memory cells MC_(1nm) constituting the first sub-memory unit of then-th layer SMU_(1n) and the memory cells MC_(2nm) constituting thesecond sub-memory unit of the n-th layer SMU_(2n) have the same thermalhistory with regard to their production processes. The memory cells cellMC_(1nm) constituting the first sub-memory unit of the n-th layerSMU_(1n) and the memory cells MC_(2nm) constituting the secondsub-memory unit of the n-th layer SMU_(2n) have a thermal historydifferent from a thermal history of the memory cell M_(1km) constitutingthe first sub-memory unit of a k-th layer (k≠n) SMU_(1k) and the memorycells MC_(2km) constituting the second sub-memory unit of the k-th layerSMU_(2k).

The memory cell MC_(1nm) in the m-th-place constituting the firstsub-memory unit of the n-th layer SMU_(1n) in the first memory unit MU₁and the memory cell MC_(2nm) in the m-th-place constituting secondsub-memory unit of the n-th layer SMU_(2n) in the second memory unit MU₂form a pair to store data of 1 bit each. When data stored in the memorycell MC_(1nm) constituting the first sub-memory unit of the n-th layerSMU_(1n) in the first memory unit MU₁ is read out, a reference potentialV_(REF-n) having an n-th potential is provided to the second bit lineBL₂, and when data stored in the memory cell MC_(2nm) constitutingsecond sub-memory unit of the n-th layer SMU_(2n) in the second memoryunit MU₂ is read out, a reference potential V_(REF-n) having the n-thpotential is provided to the first bit line BL₁. The n-th potentialdiffers from the k-th potential (k≠n).

The other source/drain region 14B of each of the first-place andsecond-place first transistors for selection TR₁₁ and TR₁₂ is connectedto the first bit line BL₁ through a contact hole 15. One source/drainregion 14A of the first-place first transistor for selection TR₁₁ isconnected to the common first electrode 21 (first common node CN₁₁) inthe first sub-memory unit of the first layer SMU₁₁ through a contacthole 18 (which will be referred to as “contact hole 18 of the firstlayer) formed through the insulating layer 16. One source/drain region14A of the second-place first transistor for selection TR₁₂ is connectedto the common first electrode 31 (second common node CN₁₂) in the firstsub-memory unit of the second layer SMU₁₂ through a contact hole 18 ofthe first layer formed through the insulating layer 16, a pad portion 25and a contact hole 28 (which will be referred to as “contact hole 28 ofthe second layer”) formed in an opening portion 27 made in an insulatinglayer 26. In the drawing, reference numeral 36A indicates an insulationlayer.

The bit lines BL₁ and BL₂ are connected to the differential senseamplifier SA. The plate line PL_(m) is connected to the plate linedecoder/driver PD. Word lines WL₁₁, WL₁₂, WL₂₁ and WL₂₂ are connected tothe word line decoder/driver WD. The word lines WL₁₁, WL₁₂, WL₂₁ andWL₂₂ are extending in the direction perpendicular to the paper surfaceof FIG. 6. The second electrode 23 of the memory cell MC_(11m)constituting the first sub-memory unit SMU₁₁ is shared with the secondelectrode of the memory cell MC_(21m) constituting the second sub-memoryunit SMU₂₁ contiguous thereto in the direction perpendicular to thepaper surface of FIG. 6, and the second electrode 23 also works as aplate line PL_(m). The second electrode 33 of the memory cell MC_(12m)constituting the first sub-memory unit SMU₁₂ is shared with the secondelectrode of the memory cell MC_(22m) constituting the second sub-memoryunit SMU₂₂ contiguous thereof in the direction perpendicular to thepaper surface of FIG. 6, and the second electrode 33 also works as aplate line PL_(m).

The circuit for providing the reference potentials V_(REF-1) andV_(REF-2) may be constituted of first and second reference capacitorsRC₁ and RC₂ (not shown in FIG. 6) made of MOS capacitors like Example 1(see the circuit diagram of FIG. 7), may comprise first and secondreference capacitors RC_(A1), RC_(A2), RC_(B1), and RC_(B2) made of aferroelectric capacitor each like Example 2 (see the circuit diagram ofFIG. 9), or may be constituted of first and second reference capacitorsRC_(A) and RC_(B) made of a ferroelectric capacitor each (see thecircuit diagram of FIG. 10). Alternatively, the referential potentialmay be outputted from a known voltage down converter or a structure inwhich a plurality of PMOS FETs are connected in series.

The first transistors for selection TR₁₁ and TR₁₂ constituting the firstmemory unit MU₁ are connected to the word line WL₁₁ and WL₁₂,respectively, the second transistors for selection TR₂₁ and TR₂₂constituting the second memory unit MU₂ are connected to the word lineWL₂₁ and WL₂₂, respectively, and the memory cells MC_(1nm) and MC_(2nm)are independently controlled. In the nonvolatile memory in an actualembodiment, sets of such memory units for storing 2×N×M bits(specifically, 16 bits) each are arranged in the form of an array asaccess units. The value of M shall not be limited to 4. It is sufficientto satisfy M≧2, and the actual value of M includes exponents of 2 (2, 4,8, 16 . . . ). Further, it is sufficient to satisfy N≧2, and the actualvalue of N includes exponents of 2 (2, 4, 8 . . . ).

When the above circuit is constituted of the first and second referencecapacitors RC₁ and RC₂ made of MOS capacitors, and for example, whendata stored in the memory cell MC_(11p) constituting the firstsub-memory unit SMU₁₁ is read out, the word line WL₁₁ is selected, andin a state where a voltage, for example, of (½)_(Vcc) is applied to theplate line PL_(j) (j≠p), the plate line PL_(p) is driven. The aboveV_(cc) refers, for example, to a power source voltage. By thisoperation, a potential corresponding to data of 1 bit stored in thememory-cell MC_(11p) appears in the first bit line BL₁ as a bit linepotential through the first-place first transistor for selection TR₁₁.And, the switching circuit SW₂₁ is brought into an ON-state. By thisoperation, the reference potential V_(REF-1) appears in the second bitline BL₂ as a bit line potential. And, the voltages (bit linepotentials) in the above bit lines BL₁ and BL₂ forming a pair aredetected with the differential sense amplifier SA.

When data stored, for example, in the memory cell MC_(22p) constitutingthe second sub-memory unit SMU₂₂ is read out, the word line WL₂₂ isselected, and in a state where a voltage, for example, of (½) V_(cc) isapplied to the plate line PL_(j) (j≠p), the plate line PL_(p) is driven.By this operation, a potential corresponding to data of 1 bit stored inthe memory cell MC_(22p) appears in the second bit line BL₂ as a bitline potential through the second-place second transistor for selectionTR₂₂. And, the switching circuit SW₁₂ is brought into an ON-state. Bythis operation, the reference potential V_(REF-2) appears in the firstbit line BL₁ as a bit line potential. And, the voltages (bit linepotentials) in the above bit lines BL₁ and BL₂ forming a pair aredetected with the differential sense amplifier SA.

When the above circuit is constituted of the first and second referencecapacitors RC_(A1), RC_(A2), RC_(B1) and RC_(B2) formed of aferroelectric capacitor each, and when data in the memory cell is readout, the switching circuits SW_(A12), SW_(A22), SW_(B12) and SW_(B22)are brought into an ON-state in advance, the second electrodeconstituting each of the reference capacitors RC_(A1), RC_(A2), RC_(B1)and RC_(B2) is connected to the reference-plate-line driver RPD, and apredetermined potential is applied to each of the reference-plate linesPL_(REF-A1), PL_(REF-A2), PL_(REF-B1) and PL_(REF-B2) from thereference-plate-line driver RPD. As a result, a charge is accumulated inthe ferroelectric layer constituting each of the reference capacitorsRC_(A1), RC_(A2), RC_(B1) and RC_(B2).

When data stored, for example, in the memory cell MC_(11p) constitutingthe first sub-memory unit SMU₁₁ is read out, the word line WL₁₁ isselected, and in a state where a voltage, for example, of (½) V_(cc) isapplied to the plate line PL_(j) (j≠p), the plate line PL_(p) is driven.By this operation, a potential corresponding to data of 1 bit stored inthe memory cell MC_(11p) appears in the first bit line BL₁ as a bit linepotential through the first-place first transistor for selection TR₁₁.And, in a state where a proper electric field is applied to theferroelectric layer of the reference capacitor RC_(B1) from the secondelectrode thereof, the switching circuit SW_(B11) is brought into anON-state. By this operation, the reference potential V_(REF-1) appearsin the second bit line BL₂ as a bit line potential. And, the voltages(bit line potentials) in the bit lines BL₁ and BL₂ forming a pair aredetected with the differential sense amplifier SA.

When data stored, for example, in the memory cell MC_(22p) constitutingthe second sub-memory unit SMU₂₂ is read out, the word line WL₂₂ isselected, and in a state where a voltage, for example, of (½) V_(cc) isapplied to the plate line PL_(j) (j≠p), the plate line PL_(p) is driven.By this operation, a potential corresponding to data of 1 bit stored inthe memory cell MC_(22p) appears in the second bit line BL₂ as a bitline potential through the second-place second transistor for selectionTR₂₂. And, in a state where a proper electric field is applied to theferroelectric layer of the reference capacitor RC_(A2) from the secondelectrode thereof, the switching circuit SW_(A21) is brought into anON-state. By this operation, the reference potential V_(REF-2) appearsin the first bit line BL₁ as a bit line potential. And, the voltages(bit line potentials) in the above bit lines BL₁ and BL₂ forming a pairare detected with the differential sense amplifier SA.

The nonvolatile memory in Example 3 or those in Examples to be explainedhereinafter can be substantially produced according to the methodexplained in the production of the nonvolatile memory in Example 1 or 2,so that the detailed explanation of production method thereof isomitted.

EXAMPLE 4

Example 4 is a variant of Example 3. FIG. 11 shows a schematic partialcross-sectional view of a nonvolatile memory in Example 4 taken bycutting part of the nonvolatile memory through an imaginaryperpendicular plane that is in parallel with the extending direction ofthe bit line. FIG. 12 shows a conceptual circuit diagram of thenonvolatile memory in Example 4, and FIG. 13 shows a more specificcircuit diagram (first sub-memory unit alone) of the conceptual circuitdiagram of FIG. 12. While FIG. 11 shows a first sub-memory unit, asecond sub-memory unit also has a similar structure, and the secondsub-memory unit is formed side by side with the first sub-memory unit inthe direction perpendicular to the paper surface of the FIG. 11. Thefollowing explanation addresses the first sub-memory unit alone in somecases. FIG. 13 omits showing of a circuit for generating a referencepotential and a differential sense amplifier.

The nonvolatile memory in Example 4 has first line BL_(1N) which are Nin number and second bit lines BL_(2N) which are N in number. In thefirst memory unit MU₁, the common first electrode in the firstsub-memory unit of an n-th layer SMU_(1n) is connected to an n-th-placefirst bit line BL_(1n) through an n-th-place first transistor forselection TR_(1n), and in the second memory unit MU₂, the common firstelectrode in the second sub-memory unit of an n-th layer SMU₂, isconnected to an n-th-place second bit line BL₂n through an n-th-placesecond transistor for selection TR_(2n).

Specifically, the other source/drain region 14B of the n-th-place firsttransistor for selection TR_(1n) is connected to the n-th-place firstbit line BL_(1n), and one source/drain region 14A of the first-placefirst transistor for selection TR₁₁ is connected to the common firstelectrode 21 (first common node CN₁₁) in the first sub-memory unit ofthe first layer SMU₁₁ through a contact hole 18 of the first layerformed through an insulating layer 16. One source/drain region 14A ofthe second-place first transistor for selection TR₁₂ is connected to thecommon first electrode 31 (second common node CN₁₂) in the firstsub-memory unit of the second layer SMU₁₂ through a contact hole 18 ofthe first layer made in the insulating layer 16, a pad portion 25 and acontact hole 28 of the second layer formed through an insulating layer26. The other source/drain region 14B of the n-th-place secondtransistor for selection TR_(2n) is connected to the n-th-place secondbit line BL_(2n), and one source/drain region 14A of the first-placesecond transistor for selection TR₂₁ is connected to the common firstelectrode 21 (first common node CN₂₁) in the second sub-memory unit ofthe first layer SMU₂₁ through a contact hole 18 of the first layerformed through the insulating layer 16. One source/drain region 14A ofthe second-place second transistor for selection TR₂₂ is connected tothe common first electrode 31 (second common node CN₂₂) in the secondsub-memory unit of the second layer SMU₂₂ through a contact hole 18 ofthe first layer formed through the insulating layer 16, a pad portion 25and a contact hole 28 of the second layer formed through the insulatinglayer 26.

The bit lines BL_(1n) and BL_(2n) are connected to the differentialsense amplifier SA.

When date stored in the memory cell MC_(1nm) constituting the firstsub-memory unit of the n-th layer SMU_(1n) in the first memory unit MU₁is read out, a reference potential V_(REF-n) having an n-th potential isprovided to the n-th-place second bit line BL₂. When data stored in thememory cell MC_(2nm) constituting the second sub-memory unit of the n-thlayer SMU_(2n) in the second memory unit MU₂ is read out, a referencepotential V_(REF-n) having an n-th potential is provided to then-th-place first bit line BL_(1n).

The circuit for providing the reference potentials V_(REF-1) andV_(REF-2) may be constituted of the first and second referencecapacitors RC₁ and RC₂ (not shown in FIG. 11) made of MOS capacitorslike Example 1 (see the circuit diagram of FIG. 12), or may beconstituted of the first and second reference capacitors RC_(A1),RC_(A2), RC_(B1) and RC_(B2) made of a ferroelectric capacitor each likeExample 2 (see the circuit diagram of FIG. 14). Alternatively, thereferential potential may be outputted from a known voltage downconverter or a structure in which a plurality of PMOS FETs are connectedin series.

When the above circuit is constituted of the first and second referencecapacitors RC₁ and RC₂ made of MOS capacitors, and for example, whendata stored in the memory cell MC_(11p) constituting the firstsub-memory unit SMU₁₁ is read out, the word line WL₁₁ is selected, andin a state where a voltage, for example, of (½) V_(cc) is applied to theplate line PL_(j) (j≠p), the plate line PL_(p) is driven. The aboveV_(cc) refers, for example, to a power source voltage. By thisoperation, a potential corresponding to data of 1 bit stored in thememory cell MC_(11p) appears in the first-place first bit line BL₁₁ as abit line potential through the first-place first transistor forselection TR₁₁. And, the switching circuit SW₂₁ is brought into anON-state. By this operation, the reference potential V_(REF-1) appearsin the first-place second bit line BL₂₁ as a bit line potential. And,the voltages (bit line potentials) in the above bit lines BL₁₁ and BL₂₁forming a pair are detected with the differential sense amplifier SA.

When data stored, for example, in the memory cell MC_(22p) constitutingthe second sub-memory unit SMU₂₂ is read out, the word line WL₂₂ isselected, and in a state where a voltage, for example, of (½) V_(cc) isapplied to the plate line PL_(j) (j≠p), the plate line PL_(p) is driven.By this operation, a potential corresponding to data of 1 bit stored inthe memory cell MC_(22p) appears in the second-place second bit lineBL₂₂ as a bit line potential through the second-place second transistorfor selection TR₂₂. And, the switching circuit SW₁₂ is brought into anON-state. By this operation, the reference potential V_(REF-2) appearsin the second-place first bit line BL₁₂ as a bit line potential. And,the voltages (bit line potentials) in the above bit lines BL₁₂ and BL₂₂forming a pair are detected with the differential sense amplifier SA.

When the above circuit is constituted of the first and second referencecapacitors RC_(A1), RC_(A2), RC_(B1) and RC_(B2) formed of aferroelectric capacitor each, and when data in the memory cell is readout, the switching circuits SW_(A12), SW_(A22), SW_(B12) and SW_(B22)are brought into an ON-state in advance, the second electrodeconstituting each of the reference capacitors RCA, RC_(A2) RC_(B1), andRC_(B2) is connected to the reference-plate-line driver RPD, and apredetermined potential is applied to each of the reference-plate linesPL_(REF-A1), PL_(REF-A2), PL_(REF-B1) and PL_(REF-B2) from thereference-plate-line driver RPD. As a result, a charge is accumulated inthe ferroelectric layer constituting each of the reference capacitorsRC_(A1), RC_(A2), RC_(B1) and RC_(B2).

When data stored, for example, in the memory cell MC_(11p) constitutingthe first sub-memory unit SMU₁₁ is read out, the word line WL₁₁ isselected, and in a state where a voltage, for example, of (½) V_(cc) isapplied to the plate line PL_(j) (j≠p), the plate line PL_(p) is driven.By this operation, a potential corresponding to data of 1 bit stored inthe memory cell MC_(11p) appears in the first-place first bit line BL₁₁as a bit line potential through the first-place first transistor forselection TR₁₁. And, in a state where a proper electric field is appliedto the ferroelectric layer of the reference capacitor RC_(B1) from thesecond electrode thereof, the switching circuit SW_(B11) is brought intoan ON-state. By this operation, the reference potential V_(REF-1)appears in the first-place second bit line BL₂₁ as a bit line potential.And, the voltages (bit line potentials) in the above bit lines BL₁₂ andBL₂₂ forming a pair are detected with the differential sense amplifierSA.

When data stored, for example, in the memory cell MC_(22p) constitutingthe second sub-memory unit SMU₂₂ is read out, the word line WL₂₂ isselected, and in a state where a voltage, for example, of (½) V_(cc) isapplied to the plate line PL_(j) (j≠p), the plate line PL_(p) is driven.By this operation, a potential corresponding to data of 1 bit stored inthe memory cell MC_(22p) appears in the second-place second bit lineBL₂₂ as a bit line potential through the second-place second transistorfor selection TR₂₂. And, in a state where a proper electric field isapplied to the ferroelectric layer of the reference capacitor RC_(A2)from the second electrode thereof, the switching circuit SW_(A21) isbrought into an ON-state. By this operation, the reference potentialV_(REF-2) appears in the second-place first bit line BL₁₂ as a bit linepotential. And, the voltages (bit line potentials) in the above bitlines BL₁₂ and BL₂₂ forming a pair are detected with the differentialsense amplifier SA.

EXAMPLE 5

Example 5 is concerned with the nonvolatile memory according to thefourth aspect of the present invention. FIG. 15 shows a circuit diagramof the nonvolatile memory in Example 5, and FIG. 16 shows a schematiclayout of various transistors constituting the nonvolatile memory. WhileFIG. 15 shows the first memory unit out of two memory units constitutingthe nonvolatile memory, the second memory unit has the same constitutionas well. FIG. 15 omits showing of the circuit for generating thereference potential and the differential sense amplifier. In FIG. 16,regions of various transistors are surrounded by dotted lines, activefields and wirings are indicated by solid lines, and gate electrodes orword lines are indicated by chain lines. With respect of the firstsub-memory units which are N in number and each of which is composed ofmemory cells which are M in number and the plate lines which are M innumber, the nonvolatile memory in Example 5 has a partialcross-sectional view that is substantially the same as the partialcross-sectional view shown in FIG. 6, so that the following explanationalso refers to FIG. 6.

The nonvolatile memory in Example 5 is a so-called gain-cell typenonvolatile memory. The nonvolatile memory comprises a first memory unitMU₁ and a second memory unit MU₂.

The first memory unit MU₁ has;

-   -   (A-1) a first bit line BL₁,    -   (B-1) first transistors for selection TR_(1N) which are N in        number (N≧2; N=2 in Example 5),    -   (C-1) first sub-memory units SMU₁₁ and SMU₁₂ which are N in        number and each of which is composed of memory cells MC_(11M)        and MC_(12M) which are M in number (M≧2; M=8 in Example 5),    -   (D-1) plate lines PL_(M) which are M in number and each of which        is shared with each memory cell constituting each of the first        sub-memory units which are N in number, between or among the        first sub-memory units which are N in number,    -   (E-1) a first transistor for writing-in TR_(W1),    -   (F-1) a first transistor for detection TR_(S1), and    -   (G-1) a first transistor for read-out TRR1.

The second memory unit has;

-   -   (A-2) a second bit line BL₂.    -   (B-2) second transistors for selection TR_(2N) which are N in        number,    -   (C-2) second sub-memory units SMU₂₁ and SMU₂₂ which are N in        number and each of which is composed of memory cells MC_(21M)        and MC_(22M) which are M in number,    -   (D-2) the plate lines PL_(M) which are M in number, each of        which is shared with each memory cell constituting each of the        second sub-memory units which are N in number, between or among        the second sub-memory units which are N in number, and which are        shared with the plate lines which constitute said first memory        unit and are M in number,    -   (E-2) a second transistor for writing-in TR_(W2),    -   (F-2) a second transistor for detection TR_(S2), and    -   (G-2) a second transistor for read-out TR_(R2).

The first sub-memory unit of an n-th layer (n=1, 2 . . . N) SMU_(1n) andthe second sub-memory unit of the n-th layer SMU_(2n) are formed on thesame insulating layer 16 or 26. The first sub-memory unit of an n′-thlayer (n′=2 . . . N) SMU_(1n′) and the second sub-memory unit of then′-th layer SMU_(2n′) are stacked on the first sub-memory unit of the(n′−1)-th layer SMU_(1(n′−1)) and the second sub-memory unit of the(n′−1)-th layer SMU_(2(n′−1)) through the insulating layer 26.

Each of the memory cells MC_(11m), MC_(21m), MC_(12m) and MC_(22m)comprises a first electrode 21 or 31, a ferroelectric layer 22 or 32 anda second electrode 23 or 33.

In the first memory unit MU₁, the first electrodes of the memory cellsMC_(1nm) constituting the first sub-memory unit of the n-th layerSMU_(1n) are in common with the first sub-memory unit of the n-th layerSMU_(1n), the common first electrode is connected to the first bit lineBL₁ through the n-th-place first transistor for selection TR_(11n) andthe first transistor for writing-in TR_(W1), and the second electrode ofthe memory cell in an m-th-place (m=1, 2 . . . M) is connected to thecommon plate line PL_(m) in the m-th-place. Specifically, the firstelectrodes 21 of the memory cells MC_(11m) constituting the firstsub-memory unit of the first layer SMU₁₁ are in common with the firstsub-memory unit of the first layer SMU₁₁, the common first electrode(common node CN₁₁) is connected to the first bit line BL₁ through thefirst-place first transistor for selection TR₁₁ and the first transistorfor writing-in TR_(W1) and the second electrode 23 of the memory cellMC_(11m) in the m-th-place is connected to the common plate line PL_(m)in the m-th-place. The first electrodes 31 of the memory cells MC_(12m)constituting the first sub-memory unit of the second layer SMU₁₂ are incommon with the first sub-memory unit of the second layer SMU₁₂, thecommon first electrode (common node CN₁₂) is connected to the first bitline BL₁ through the second-place first transistor for selection TR₁₂and the first transistor for writing-in TR_(W1), and the secondelectrode 33 of the memory cell MC_(12m) in the m-th-place is connectedto the common plate line PL_(m) in the m-th-place.

In the second memory unit MU₂, the first electrodes of the memory cellsMC_(2nm) constituting the second sub-memory unit of the n-th layerSMU_(2n) are in common with the second sub-memory unit of the n-th layerSMU_(2n), the common first electrode is connected to the second bit lineBL₂ through the n-th-place second transistor for selection TR_(2n) andthe second transistor for writing-in TR_(W2), and the second electrodeof the memory cell MC_(2nm) in the m-th-place is connected to the commonplate line PL_(m) in the m-th-place. Specifically, the first electrodes21 of the memory cells MC_(21m) constituting the second sub-memory unitof the first layer SMU₂₁ are in common with the second sub-memory unitof the first layer SMU₂₁, the common first electrode (common node CN₂₁)is connected to the second bit line BL₂ through the first-place secondtransistor for selection TR₂₁ and the second transistor for writing-inTR_(W2), and the second electrode 23 of the memory cell MC_(21m) in them-th-place is connected to the common plate line PL_(m) in them-th-place. The first electrodes 31 of the memory cells MC_(22m)constituting the second sub-memory unit of the second layer SMU₂₂ are incommon with the second sub-memory unit of the second layer SMU₂₂, thecommon first electrode (common node CN₂₂) is connected to the second bitline BL₂ through the second-place second transistor for selection TR₂₂and the second transistor for writing-in TR_(W2) and the secondelectrode 33 of the memory cell MC_(22m) in the m-th-place is connectedto the common plate line PL_(m) in the m-th-place.

The memory cells MC_(1nm) constituting the first sub-memory unit of then-th layer SMU_(1n) and the memory cells MC_(2nm) constituting thesecond sub-memory unit of the n-th layer SMU_(2n) have the same thermalhistory with regard to their production processes, and the memory cellsMC_(1nm) constituting the first sub-memory unit of the n-th layerSMU_(1n) and the memory cells MC_(2nm) constituting the secondsub-memory unit of the n-th layer SMU_(2n) have the thermal historydifferent from the thermal history of the memory cells MC_(1km)constituting the first sub-memory unit of a k-th layer (k≠n) SMU_(1k)and the memory cells MC_(2km) constituting the second sub-memory unit ofthe k-th layer SMU_(2k).

The memory cell MC_(1nm) in the m-th-place constituting the firstsub-memory unit of the n-th layer SMU_(1n) in the first memory unit MU₁and the memory cell MC_(2nm) in the m-th-place constituting the secondsub-memory unit of the n-th layer SMU_(2n) form a pair to store data of1 bit each.

One end of the first transistor for detection TR_(S1) is connected to afirst wiring (power source line made of an impurity-doped layer) havinga predetermined potential V_(cc), and the other end thereof is connectedto the first bit line BL₁ through the first transistor for read-outTR_(R1). One end of the second transistor for detection TR_(S2) isconnected to a second wiring (power source line made of animpurity-doped layer) having a predetermined potential V_(cc), and theother end thereof is connected to the second bit line BL₂ through thesecond transistor for read-out TR_(R2).

Specifically, those various transistors are formed of MOS type FETs. Onesource/drain region of the first transistor for writing-in TR_(W1) isconnected to the first bit line BL₁ through a contact hole, and theother source/drain region thereof is connected to one source/drainregion of each of the first transistors for selection TR₁₁ and TR₁₂through a contact hole 18B formed through an insulating layer 16, asecondary bit line (not shown) and a contact hole 18C formed through theinsulating layer 16. The other source/drain region of the first-placefirst transistor for selection TR₁₁ is connected to the common firstelectrode (common node CN₁₁) constituting the sub-memory unit SMU₁₁through a contact hole 18 ₁ formed through the insulating layer 16. Theother source/drain region of the second-place first transistor forselection TR₁₂ is connected to the common first electrode (common nodeCN₁₂) through a contact hole 18 ₂ formed through the insulating layer 16and a contact hole 28 formed through the insulating layer 26. Onesource/drain region of the first transistor for detection TR_(S1) isconnected to the first wiring having a predetermined potential V_(cc),and the other source/drain region thereof is connected to onesource/drain region of the first transistor for read-out TR_(R1). Theother source/drain region of the first transistor for read-out TR_(R1)is connected to the first bit line BL₁ through a contact hole 15. Onesource/drain region of each of the first transistors for selection TR₁₁and TR₁₂ or the other source/drain region of the first transistor forwriting-in TR_(W1) is connected to the gate electrode of the firsttransistor for detection TR_(S1), through the secondary bit line (notshown) and a contact hole 18A. The extending portion of the gateelectrode of the first transistor for detection TR_(S1), is indicated bya symbol WL_(S1). The other source/drain region of the first transistorfor detection TR_(S1) and one source/drain region of the firsttransistor for read-out TR_(R1) occupy one source/drain region. The wordline WL_(W1) connected to the gate electrode of the first transistor forwriting-in TR_(W1), the word line WL_(R1) connected to the gateelectrode of the first transistor for read-out TR_(R1) and the wordlines WL₁₁ and WL₁₂ connected to the gate electrodes of the firsttransistors for selection TR₁₁ and TR₁₂ are connected to the word linedecoder/driver. Each plate line PL_(m) is connected to the plate linedecoder/driver PD. The bit lines BL₁ and BL₂ are connected to thedifferential sense amplifier SA. The above secondary bit line isextending on a lower insulating layer and is connected to the first bitline BL₁.

When data stored in each memory cell MC_(1nm) constituting the firstsub-memory unit of the n-th layer SMU_(1n) in the first memory unit MU₁is read out, the n-th-place first transistor for selection TR_(1n) andthe first transistor for read-out TR_(R1) are brought into a conductingstate, the operation of the first transistor for detection TR_(S1), iscontrolled by a potential that occurs in the common first electrode(common node CN₁₁ or CN₁₂) on the basis of the data stored in the memorycell MC_(1nm) and a reference potential V_(REF-n) having an n-thpotential is provided to the second bit line BL₂. When data stored ineach memory cell MC_(2nm) constituting the second sub-memory unit of then-th layer SMU_(2n) in the second memory unit MU₂ is read out, then-th-place second transistor for selection TR_(2n) and the secondtransistor for read-out TR_(R2) are brought into a conductive state, theoperation of the second transistor for detection TR_(S2) is controlledby a potential that occurs in the common first electrode (common nodeCN₂₁ or CN₂₂) on the basis of the data stored in the memory cellMC_(2nm), and a reference potential V_(REF-n) having an n-th potentialis provided to the first bit line BL₁. The n-th potential differs fromthe k-th potential (k≠n).

The first transistors for selection TR₁₁ and TR₁₂ constituting the firstmemory unit MU₁ are connected to the word lines WL₁₁ and WL₁₂,respectively, the second transistors for selection TR₂₁ and TR₂₂constituting the second memory unit MU₂ are connected to the word linesWL₂₁ and WL₂₂ respectively, and the memory cells MC_(1nm) and MC_(2nm)are independently controlled. In the nonvolatile memory in an actualembodiment, sets of such memory units for storing 2×N×M bits(specifically, 16 bits) each are arranged in the form of an array asaccess units. The value of M shall not be limited to 4. It is sufficientto satisfy M≧2, and the actual value of M includes exponents of 2 (2, 4,8, 16 . . . ). Further, it is sufficient to satisfy N≧2, and the actualvalue of N includes exponents of 2 (2, 4, 8 . . . ).

The structure of the sub-memory units SMU_(1N) and SMU_(2N) can besubstantially the same as the structure of the sub-memory units SMU_(1N)and SMU_(2N) explained in Example 3, so that a detailed explanationthereof is omitted.

The size (occupation area) of the nonvolatile memory in Example 5 is, inprinciple, determined by the pitch and number (value of M) of the platelines PL_(M) in one direction, and, further, the size thereof in thedirection at right angles in the above direction is determined by thepitch and number (value of N) of the common nodes. The area (size) ofthe region that the nonvolatile memory occupies in a semiconductorsubstrate is mainly determined depending upon the area (size) that thetransistors for selection TR₁₁, TR₁₂, TR₂₁ and TR₂₂ occupy. Thetransistors for writing-in TR_(W1) and TR_(W2), the transistors forread-out TR_(R1), and TR_(R2) and the transistors for detection TR_(S1)and TR_(S2) can be formed in an empty region of the semiconductorsubstrate, and the area of the empty region increases with an increasein each of the number (N) of the sub-memory units and the number (M) ofthe memory cells constituting the sub-memory units. When the transistorsfor writing-in TR_(W1) and TR_(W2), the transistors for read-out TR_(R2)and TR_(R2) and the transistors for detection TR_(S1) and TR_(S2) areformed in the empty region of the semiconductor substrate, thesemiconductor substrate can be remarkably effectively utilized.

When data is read out from the memory cell MC_(11p) constituting thefirst sub-memory unit SMU₁₁ in the first memory unit MU₁, V_(cc) isapplied to the selected plate line PL_(p). In this case, when data “1”is stored in the selected memory cell MC_(11p), polarization inversiontakes place in the ferroelectric layer, the accumulated charge amountincreases, and the potential of the common node CN₁₁ increases. Whendata “0” is stored in the selected memory cell MC_(11p), thepolarization inversion does not take place in the ferroelectric layer,and the potential of the common node CN₁₁ hardly increases. That is, thecommon node CN₁₁ is coupled with a plurality of non-selected plate linesPL_(j) through the ferroelectric layer of the non-selected memory cells,so that the potential of the common node CN₁₁ is maintained at a levelrelatively close to 0 volt. In this manner, a change is caused on thepotential of the common node CN₁₁ depending upon the data stored in theselected memory cell MC_(11p). Therefore, the ferroelectric layer of theselected memory cell MC_(11p) can be provided with an electric fieldsufficient for polarization inversion. Then, the first bit line BL₁ isbrought into a floating state, and the first transistor for read-outTR_(R1) is brought into an ON-state. And, the operation of the firsttransistor for detection TR_(S1) is controlled on the basis of thepotential that is caused in the common first electrode (common nodeCN₁₁) due to the data stored in the selected memory cell MC_(11p).Specifically, when a high potential occurs in the common first electrode(common node CN₁₁) on the basis of the data stored in the selectedmemory cell MC_(11p), the first transistor for detection TR_(S1) comesinto a conducting state. And, since one source/drain region of the firsttransistor for detection TR_(S1) is connected to the first wiring havinga predetermined potential V_(cc), electric current flows into the firstbit line BL₁, from the above first wiring through the first transistorfor detection TR_(S1) and the first transistor for read-out TR_(R1), sothat the potential of the first bit line BL₁ increases. That is, achange in the potential of the common first electrode (common node CN₁₁)is detected with a signal detective circuit, and the detection result istransmitted to the first bit line BL₁ as a voltage (potential). In thiscase, the potential of the first bit line BL₁ comes to be approximately(V_(g)−V_(th)), in which V_(th) is a threshold value of the firsttransistor for detection TR_(S1) and V_(g) is a potential of the gateportion of the first transistor for detection TR_(S1) (i.e., potentialof the common node CN₁₁). When the first transistor for detectionTR_(S1) is formed of a depression type NMOSFET, the threshold valueV_(th) is a negative value, so that stabilized sense signal amount canbe secured regardless of a load on the first bit line BL₁. Thetransistor for detection TR_(S1) may be formed of PMOSFET. To the secondbit line BL₂ is applied the first reference potential V_(REF-1) as isexplained in Example 1 or 2.

The number (M) of the memory cells constituting the sub-memory unit isrequired to be a number that serves to provide the ferroelectric layerof the selected memory cell with a sufficiently large electric field sothat the ferroelectric layer reliably undergoes polarization inversion.That is, when the value of M is too small, and when V_(cc) is applied tothe selected plate line PL_(p), the potential of the common firstelectrode in a floating state greatly increases on the basis of thecoupling of the second electrode and the first electrode. As a result,no sufficient electric field is formed between the second electrode andthe first electrode, so that the ferroelectric layer is caused to haveno polarization inversion. Since the value of the potential (which willbe referred to as “signal potential”) that appears in the firstelectrode is obtained by dividing an accumulated charge amount with aload capacity, the potential that appears in the first electrode comesto be too low when the value of M is too large. When V_(cc) is appliedto the selected plate line PL_(p), and when data “1” is stored in theselected memory cell, an electric field is caused between the firstelectrode and the second electrode in the direction in which thepolarization of the ferroelectric layer is inverted. Therefore, thesignal potential from the above selected memory cell (the potential thatappears in the common first electrode in a floating state and that is apotential V_(g) to be applied to the gate electrode of the firsttransistor for detection TR_(S1)) is higher than that when data “0” isstored. With an increase in the difference between the signal potentialwhen data “1” is stored and the signal potential when data “0” isstored, the reliability in reading-out of data increases. When the valueof M is 1, the load capacity in the common node CN₁₁ is too small, andas a result, the signal potential when data “1” is stored and the signalpotential when data “0” is stored increase to excess, so that thepotential difference between the signal potential and V_(cc) applied tothe plate line PL_(p) comes to be too small. The polarization inversionin the ferroelectric layer is therefore insufficient, and it isdifficult to read out the data stored in the selected memory cell. Whenthe value of M is 2 or greater, the potential difference between thesignal potential and the V_(cc) applied to the plate line PL_(p) issufficiently large in the selected memory cell, so that the data can bereliably read out from the selected memory cell. As the value of Mincreases, the load capacity of the common node CN₁₁ increases, and whenthe value of M exceeds a certain level, the value of signal amount,which is a potential difference between the signal potential and theV_(cc) applied to the plate line PL_(p), begins to decrease. The valueof M therefore includes optimum values, and the optimum value of M is inthe range of 2≦M≦128, preferably 2≦M≦32.

In Example 5, the predetermined potential of the first and secondwirings to which one end of the first transistor for detection and oneend of the second transistor for detection are connected shall not belimited to V_(cc), and one end of each of them may be grounded. That is,the potential of the first and second wirings to which one end of thefirst transistor for detection and one end of the second transistor fordetection are connected may be 0 volt. In this case, if a potential(V_(cc)) appears in the bit line when data is read out from a selectedmemory cell, it is required to adjust the bit line voltage to 0 voltwhen data is re-written, and if 0 volts appears in the bit line whendata is read out from a selected memory cell, it is required to adjustthe bit line voltage to V_(cc) when data is re-written. For thispurpose, a kind of switching circuit (inversion circuit) composed oftransistors TR_(IV-1), TR_(IV-2), TR_(IV-3) and TR_(IV-4) as shown inFIG. 17 is provided between the bit lines, and there can be employed aconstitution in which the transistors TR_(IV-2) and TR_(IV-4) arebrought into an ON-state when data is read out and the transistorsTR_(IV-1) and TR_(IV-3) are brought into an ON-state when data isre-written.

EXAMPLE 6

Example 6 is concerned with the nonvolatile memory according to thefifth and sixth aspects of the present invention. The schematic partialcross-sectional view of the nonvolatile memory in Example 6, taken bycutting part of the nonvolatile memory through an imaginaryperpendicular plane in parallel with the extending direction of the bitline, is as shown in FIG. 1. FIG. 18A shows a conceptual circuit diagramof the nonvolatile memory according to the sixth aspect of the presentinvention, and FIG. 19 shows a more specific circuit diagram of theconceptual circuit diagram shown in FIG. 18A. While FIG. 1 shows a firstsub-memory unit, a second sub-memory unit also has a similar structure,and the second sub-memory unit is formed side by side with the firstsub-memory unit in the direction perpendicular to the paper surface ofthe FIG. 1. The following explanation addresses the first sub-memoryunit alone in some cases.

The nonvolatile memory in Example 6 has a plurality of memory cellsMC_(11M), MC_(12M), MC_(21M) and MC_(22M) comprising a first electrode21 or 31, a ferroelectric layer 22 or 32 formed at least on the abovefirst electrode 21 or 31 and a second electrode 23 or 33 formed on theabove ferroelectric layer 22 or 32. A plurality of the memory cellsbelong to one of two or more different thermal histories with regard totheir production processes (specifically, in Example 6, the memory cellsMC_(11M) and the memory cells MC_(21M) belong to one and the samethermal history group, and the memory cells MC_(12M) and the memorycells MC_(22M) belong to another and the same thermal history group), apair of memory cells (MC_(1nm) and MC_(2nm)) store complement data of 1bit, and the pair of the memory cells (MC_(1nm) and MC_(2nm)) belong tothe same thermal history group.

In the nonvolatile memory of Example 6, the memory cells have astructure in which they are stacked through an insulating layer 26, thememory cells MC_(11M) and MC_(21M) formed on a certain insulating layer16 belong to a thermal history group different from a thermal historygroup to which the memory cell MC_(12M) and MC_(22M) formed on otherinsulating layer 26 belong. The memory cells MC_(11M) and MC_(21M)formed on the same insulating layer 16 belong to the same thermalhistory group and the memory cells MC_(12M) and MC_(22M) formed on thesame insulating layer 26 belong to the same thermal history group.

The nonvolatile memory in Example 6 comprises a first memory unit MU₁and a second memory unit MU₂.

The first memory unit MU₁ has;

-   -   (A-1) a first bit line BL₁,    -   (B-1) a first transistor for selection TR₁,    -   (C-1) first sub-memory units SMU_(1N) which are N in number.        (N≧2; N=2 in Example 6) and each of which is composed of memory        cells MC_(1NM) which are M in number (M≧4; M=4 in Example 6),        and    -   (D-1) plate lines which are M×N in number.

The second memory unit has;

-   -   (A-2) a second bit line BL₂,    -   (B-2) a second transistor for selection TR₂,    -   (C-2) second sub-memory units SMU_(2N) which are N in number and        each of which is composed of memory cells MC_(2NM) which are M        in number, and    -   (D-2) the plate lines which are M×N in number and are shared        with the plate lines which are M×N in number and constitute the        above first memory unit.

The first sub-memory unit of an n-th layer (n=1, 2 . . . N) SMU_(1n) andthe second sub-memory unit of the n-th layer SMU_(2n) are formed on thesame insulating layer 16 or 26, and the first sub-memory unit of ann′-th layer (n′=2 . . . N) SMU_(1n′) and the second sub-memory unit ofthe n′-th layer SMU_(2n′) are stacked on the first sub-memory unit ofthe (n′−1)-th layer SMU_(1(n′−1)) and the second sub-memory unit of the(n′−1)-th layer SMU_(2(n′−1)) through the insulating layer 26.

Each of the memory cells MC_(11m) and MC_(21m) and the memory cellsMC_(12m) and MC_(22m) comprises the first electrode 21 or 31, aferroelectric layer 22 or 32 and a second electrode 23 or 33.

In the first memory unit MU₁, the first electrodes of the memory cellsMC_(1nm) constituting the first sub-memory unit of the n-th layerSMU_(1n) are in common with the first sub-memory unit of the n-th layerSMU_(1n), the common first electrode is connected to the first bit lineBL₁ through the first transistor for selection TR₁, and the secondelectrode of the memory cell MC_(1nm) in the m-th-place (m=1, 2 . . . M)is connected to the common plate line in the [(n−1)M+m]-th-place.Specifically, the first electrodes 21 of the memory cells MC_(11m)constituting the first sub-memory unit of the first layer SMU₁₁ are incommon with the first sub-memory unit of the first layer SMU₁₁, thecommon first electrode (common node CN₁₁) is connected to the first bitline BL₁ through the first transistor for selection TR₁, and the secondelectrode 23 of the memory cell MC_(11m) in the m-th-place (m=1, 2 . . .M) is connected to the common plate line in the [(n−1)M+m]-th-place. Thefirst electrodes 31 of the memory cells MC_(12m) constituting the firstsub-memory unit of the second layer SMU₁₂ are in common with the firstsub-memory unit of the second layer SMU₁₂, the common first electrode(common node CN₁₂) is connected to the first bit line BL₁ through thefirst transistor for selection TR₁, and the second electrode 33 of thememory cell MC_(12m) in the m-th-place (m=1, 2 . . . M) is connected tothe common plate line in the [(n−1)M+m]-th-place.

In the second memory unit MU₂, the first electrodes of the memory cellsMC_(2nm) constituting the second sub-memory unit of the n-th layerSMU_(2n) are in common with the second sub-memory unit of the n-th layerSMU_(2n), the common first electrode is connected to the second bit lineBL₂ through the second transistor for selection TR₂, and the secondelectrode of the memory cell MC_(2nm) in the m-th-place is connected tothe common plate line in the [(n−1)M+m]-th-place. Specifically, thefirst electrodes 21 of the memory cells MC_(21m) constituting the secondsub-memory unit of the first layer SMU₂₁ are in common with the secondsub-memory unit of the first layer SMU₂₁, the common first electrode(common node CN₂₁) is connected to the second bit line BL₂ through thesecond transistor for selection TR₂, and the second electrode 23 of thememory cell MC_(21m) in the m-th-place is connected to the common plateline in the [(n-1)M+m]-th-place. The first electrodes 31 of the memorycells MC_(22m) constituting the second sub-memory unit of the secondlayer SMU₂₂ are in common with the second sub-memory unit of the secondlayer SMU₂₂, the common first electrode (common node CN₂₂) is connectedto the second bit line BL₂ through the second transistor for selectionTR₂, and the second electrode 33 of the memory cell MC_(21m) in them-th-place is connected to the common plate line in the[(n−1)M+m]-th-place.

The memory cells MC_(1nm) constituting the first sub-memory unit of then-th layer SMU_(1n) and the memory cells MC_(2nm) constituting thesecond sub-memory unit of the n-th layer SMU_(2n) have the same thermalhistory with regard to their production processes, and the memory cellsMC_(1nm) constituting the first sub-memory unit of the n-th layerSMU_(1n) and the memory cells MC_(2nm) constituting the secondsub-memory unit of the n-th layer SMU_(2n) have a thermal historydifferent from a thermal history of the memory cells MC_(1km)constituting the first sub-memory unit of a k-th layer (k≠n) and thememory cells MC_(2km) constituting the second sub-memory unit of thek-th layer SMU_(2k).

The memory cell MC_(1nm) in the m-th-place constituting the firstsub-memory unit of the n-th layer SMU_(1n) in the first memory unit MU₁and the memory cell MC_(2nm) in the m-th-place constituting the secondsub-memory unit of the n-th layer SMU_(2n) in the second memory unit MU₂form a pair to store complement data.

The first and second memory units MU₁ and MU₂ in Example 6 specificallyhas the same structure as that of the first and second memory units MU₁and MU₂ in Example 1, so that their detailed explanation is omitted.

The first transistor for selection TR₁ constituting the first memoryunit MU₁ and the second transistor for selection TR₂ constituting thesecond memory unit MU₂ are connected to the same word line WL, and thememory cells MC_(1nm) and MC_(2nm) are simultaneously controlled. In thenonvolatile memory in an actual embodiment, sets of such memory unitsfor storing N×M bits (specifically, 8 bits) each are arranged in theform of an array as access units. The value of M shall not be limited to4. It is sufficient to satisfy M≧2, and the actual value of M includesexponents of 2 (2, 4, 8, 16 . . . ). Further, it is sufficient tosatisfy N≧2, and the actual value of N includes exponents of 2 (2, 4, 8. . . ).

When complement data stored, for example, in the memory cell MC_(11p)(p=one of 1, 2, 3 and 4) constituting the first sub-memory unit SMU₁₁and the memory cell MC_(21p) constituting the second sub-memory unitSMU₂₁ is read out, the word line WL is selected, and in a state where avoltage, for example, of (½) V_(cc) is applied to the plate lineconnected to those memory cells other than the memory cells MC_(11p) andMC_(21p), the plate line to which the memory cells MC_(11p) and MC_(21p)are connected is driven. The above V_(cc) refers, for example, a powersource voltage. By the above operation, the potentials corresponding todata of 1 bit stored in the memory cells MC_(11p) and MC_(21p) appear inthe first bit line BL₁ and the second bit line BL₂ as bit linepotentials through the first transistor for selection TR₁ and the secondtransistor for selection TR₂. And, the voltages (bit line potentials) inthe above bit lines BL₁₂ and BL₂₂ forming a pair are detected with thedifferential sense amplifier SA.

In the nonvolatile memory in Example 6, complement data of 1 bit isstored in a pair of memory cells. It is ensured that a pair of suchmemory cells belong to the same thermal history group with regard totheir production processes, so that there is hardly caused a differencein the bit line potentials that appear in the bit lines.

Alternatively, as shown in FIG. 18B, there may be employed aconstitution in which the first transistor for selection TR₁constituting the first memory unit MU₁ is connected to the word lineWL₁, the second transistor for selection TR₂ constituting the secondmemory unit MU₂ is connected to the word line WL₂, and the word line WL₁and the word line WL₂ are simultaneously driven so that the memory cellsMC_(1nm) and MC_(2nm) are simultaneously controlled.

EXAMPLE 7

Example 7 is concerned with the nonvolatile memory according to thefifth and seventh aspects of the present invention. The schematicpartial cross-sectional view of the nonvolatile memory in Example 7,taken by cutting part of the nonvolatile memory through an imaginaryperpendicular plane in parallel with the extending direction of the bitline, is as shown in FIG. 6. FIG. 20A shows a conceptual circuit diagramof the nonvolatile memory according to the seventh aspect of the presentinvention, and FIG. 21 shows a more specific circuit diagram of theconceptual circuit diagram shown in FIG. 20A. While FIG. 6 shows a firstsub-memory unit, a second sub-memory unit also has a similar structure,and the second sub-memory unit is formed side by side with the firstsub-memory unit in the direction perpendicular to the paper surface ofthe FIG. 6. The following explanation addresses the first sub-memoryunit alone in some cases.

The nonvolatile memory in Example 7 comprises a first memory unit MU₁and a second memory unit MU₂.

The first memory unit MU₁ has;

-   -   (A-1) a first bit line BL₁,    -   (B-1) first transistors for selection TR_(1N) which are N in        number (N≧2; N=2 in Example 7),    -   (C-1) first sub-memory units SMU_(1N) which are N in number and        each of which is composed of memory cells MC_(1NM) which are M        in number (M≧2; M=4 in Example 7), and    -   (D-1) plate lines PL_(M) which are M in number and each of which        is shared with each memory cell constituting the first        sub-memory units which are N in number, between or among the        first sub-memory units which are N in number.

The second memory unit has;

-   -   (A-2) a second bit line BL₂,    -   (B-2) second transistors for selection TR_(2N) which are N in        number,    -   (C-2) second sub-memory units SMU_(2N) which are N in number and        each of which is composed of memory cells MC_(2NM) which are M        in number, and    -   (D-2) the plate lines PL_(M) which are M in number, each of        which is shared with each memory cell constituting the second        sub-memory units which are N in number, between or among the        second sub-memory units which are N in number, and which are        shared with the plate lines which are M in number and constitute        said first memory unit.

The first sub-memory unit of an n-th layer (n=1, 2 . . . N) SMU_(1n) andthe second sub-memory unit of the n-th layer SMU_(2n) are formed on thesame insulating layer 16 or 26, and the first sub-memory unit of ann′-th layer (n′=2 . . . N) SMU_(1n′) and the second sub-memory unit ofthe n′-th layer SMU_(2n′) are stacked on the first sub-memory unit ofthe (n′−1)-th layer SMU_(1(n′−1)) and the second sub-memory unit of the(n′−1)-th layer SMU_(2(n′−1)) through the insulating layer 26.

Each of the memory cells MC_(11m) and MC_(21m) and the memory cellsMC_(12m) and MC_(22m) comprises a first electrode 21 or 31, aferroelectric layer 22 or 32 and a second electrode 23 or 33.

In the first memory unit MU₁, the first electrodes of the memory cellsMC_(1nm) constituting the first sub-memory unit of the n-th layerSMU_(1n) are in common with the first sub-memory unit of the n-th layerSMU_(1n), the common first electrode is connected to the first bit lineBL₁, through the n-th-place first transistor for selection TR_(1n), andthe second electrode of the memory cell MC_(1nm) in the m-th-place (m=1,2 . . . M) is connected to the common plate line PL_(m) in them-th-place. Specifically, the first electrodes 21 (which will bereferred to as “common node CN₁₁” in some cases) of the memory cellsMC_(11m) constituting the first sub-memory unit of the first layer SMU₁₁are in common with the first sub-memory unit of the first layer SMU₁₁,the common first electrode 21 (common node CN₁₁) is connected to thefirst bit line BL₁ through the first-place first transistor forselection TR₁₁, and the second electrode 23 of the memory cell MC_(11m)in the m-th-place is connected to the common plate line PL_(m) in them-th-place. The first electrodes 31 (which will be referred to as“common node CN₁₂” in some cases) of the memory cells MC_(12m)constituting the first sub-memory unit of the second layer SMU₁₂ are incommon with the first sub-memory unit of the second layer SMU₁₂, thecommon first electrode 31 (common node CN₁₂) is connected to the firstbit line BL₁ through the second-place first transistor for selectionTR₁₂, and the second electrode of the memory cell MC_(12m) in them-th-place is connected to the common plate line PL_(m) in them-th-place. The plate line PL_(m) is also connected to the secondelectrode 23 or 33 of the memory cell constituting the second memoryunit MU₂. In Example 7, more specifically, the plate lines are extendingfrom the second electrodes 23 and 33. The plate lines PL_(m) areinter-connected in a region that is not shown.

In the second memory unit MU₂, the first electrodes of the memory cellsMC_(2nm) constituting the second sub-memory unit of the n-th layerSMU_(2n) are in common with the second sub-memory unit of the n-th layerSMU_(2n), the common first electrode is connected to the second bit lineBL₂ through the n-th-place second transistor for selection TR_(2n), andthe second electrode of the memory cell MC_(2nm) in the m-th-place isconnected to the common plate line PL_(m) in the m-th-place.Specifically, the first electrodes 21 (which will be sometimes referredto as “common node CN₂₁” in some cases) of the memory cells MC_(21m)constituting the second sub-memory unit of the first layer SMU₂₁ are incommon with the second sub-memory unit of the first layer SMU₂₁, thecommon first electrode 21 (common node CN₂₁) is connected to the secondbit line BL₂ through the first-place second transistor for selectionTR₂₁, and the second electrode 23 of the memory cell MC_(21m) in them-th-place is connected to the common plate line PL_(m) in them-th-place. The first electrodes 31 (which will be sometimes referred toas “common node CN₂₂” in some cases) of the memory cells MC_(22m)constituting the second sub-memory unit of the second layer SMU₂₂ are incommon with the second sub-memory unit of the second layer SMU₂₂, thecommon first electrode 31 (common node CN₂₂) is connected to the secondbit line BL₂ through the second-place second transistor for selectionTR₂₂, and the second electrode 33 of the memory cell MC_(22m) in them-th-place is connected to the common plate line in the m-th-place.

The memory cells MC_(1nm) constituting the first sub-memory unit of then-th layer SMU_(1n) and the memory cells MC_(2nm) constituting thesecond sub-memory unit of the n-th layer SMU_(2n) have the same thermalhistory with regard to their production processes, and the memory cellsMC_(1nm) constituting the first sub-memory unit of the n-th layerSMU_(1n) and the memory cells MC_(2n) constituting the second sub-memoryunit of the n-th layer SMU_(2n) have a thermal history different from athermal history of the memory cells MC_(1km) constituting the firstsub-memory unit of a k-th layer (k≠n) SMU_(1k) and the memory cellsMC_(2km) constituting the second sub-memory unit of the k-th layerSMU_(2k.)

The memory cell MC_(1nm) in the m-th-place constituting the firstsub-memory unit of the n-th layer SMU_(1n) in the first memory unit MU₁and the memory cell MC_(2nm) in the m-th-place constituting the secondsub-memory unit of the n-th layer SMU_(2n) in the second memory unit MU₂form a pair to store complement data.

The specific structure of the first and second memory units MU₁ and MU₂in Example 7 can be the same as the structure of the first and secondmemory units MU₁ and MU₂ explained in Example 3 with reference to FIG.6, so that a detailed explanation thereof is omitted.

The first-place first transistor for selection TR₁₁ constituting thefirst memory unit MU₁ and the first-place second transistor forselection TR₂₁ constituting the second memory unit MU₂ are connected tothe same word line WL₁, and the memory cells MC_(11m) and MC_(21m) aresimultaneously controlled. The second-place first transistor forselection TR₁₂ constituting the first memory unit MU₁ and thesecond-place second transistor for selection TR₂₂ constituting thesecond memory unit MU₂ are connected to the same word line WL₂, and thememory cells MC_(12m) and MC_(22m) are simultaneously controlled. In thenonvolatile memory in an actual embodiment, sets of such memory unitsfor storing N×M bits (specifically, 8 bits) each are arranged in theform of an array as access units. The value of M shall not be limited to4. It is sufficient to satisfy M≧2, and the actual value of M includesexponents of 2 (2, 4, 8, 16 . . . ). Further, it is sufficient tosatisfy N≧2, and the actual value of N includes exponents of 2 (2, 4, 8. . . ).

When complement data stored, for example, in the memory cell MC_(11p)(p=one of 1, 2, 3 and 4) constituting the first sub-memory unit SMU₁₁and the memory cell MC_(21p) constituting the second sub-memory unitSMU₂₁ is read out, the word line WL₁ is selected, and in a state where avoltage, for example, of (½) V_(cc) is applied to the plate line PL_(j)(j≠p) connected to those memory cells other than the memory cellsMC_(11p) and MC_(21p), the plate line PL_(p) to which the memory cellsMC_(11p) and MC_(21p) are connected is driven. The above V_(cc) refers,for example, a power source voltage. By the above operation, thepotentials corresponding to complement data of 1 bit stored in thememory cells MC_(11p) and MC_(21p) appear in the first bit line BL₁ andthe second bit line BL₂ as bit line potentials through the first-placefirst transistor for selection TR₁₁ and the first-place secondtransistor for selection TR₂₁. And, the voltages (bit line potentials)in the above bit lines BL₁₂ and BL₂₂ forming a pair are detected withthe differential sense amplifier SA.

Alternatively, as shown in FIG. 20B, there may be employed aconstitution in which the first-place first transistor for selectionTR₁₁ is connected to the word line WL₁₁, the second-place firsttransistor for selection TR₁₂ is connected to the word line WL₁₂, thefirst-place second transistor for selection TR₂₁ is connected to theword line WL₂₁, the second-place second transistor for selection TR₂₂ isconnected to the word line WL₂₂, the word line WL₁₁ and the word lineWL₂₁ are simultaneously driven, and, the word line WL₁₂ and the wordline WL₂₂ are simultaneously driven so that the memory cells MC_(1nm)and MC_(2nm) are simultaneously controlled.

EXAMPLE 8

Example 8 is a variant of Example 7. The schematic partialcross-sectional view of the nonvolatile memory in Example 8, taken bycutting part of the nonvolatile memory through an imaginaryperpendicular plane in parallel with the extending direction of the bitline, is as shown in FIG. 11. FIG. 22A shows a conceptual circuitdiagram of the nonvolatile memory in Example 8. While FIG. 11 shows afirst sub-memory unit, a second sub-memory unit also has a similarstructure, and the second sub-memory unit is formed side by side withthe first sub-memory unit in the direction perpendicular to the papersurface of the FIG. 11. The following explanation addresses the firstsub-memory unit alone in some cases.

The nonvolatile memory in Example 8 has first bit lines BL_(1N) whichare N in number and second bit-lines BL_(2N) which are N in number. Inthe first memory unit MU₁, the common first electrode in the firstsub-memory unit of the n-th layer SMU_(1n) is connected to then-th-place first bit line BL_(1n) through the n-th-place firsttransistor for selection TR_(1n), and in the second memory unit MU₂, thecommon first electrode in the second sub-memory unit of the n-th layerSMU_(2n) is connected to the n-th-place second bit line BL_(2n) throughthe n-th-place second transistor for selection TR_(2n).

The specific structure of the first and second memory units MU₁ and MU₂in Example 8 can be the same as the structure of the first and secondmemory units MU₁ and MU₂ explained in Example 4 with reference to FIG.11, so that a detailed explanation thereof is omitted.

The first-place first transistor for selection TR₁₁ constituting thefirst memory unit MU₁ and the first-place second transistor forselection TR₂₁ constituting the second memory unit MU₂ are connected tothe same word line WL₁, and the memory cells MC_(11m) and MC_(21m) aresimultaneously controlled. The second-place first transistor forselection TR₁₂ constituting the first memory unit MU₁ and thesecond-place second transistor for selection TR₂₂ constituting thesecond memory unit MU₂ are connected to the same word line WL₂, and thememory cells MC_(12m) and MC_(22m) are simultaneously controlled. In thenonvolatile memory in an actual embodiment, sets of such memory unitsfor storing N×M bits (specifically, 8 bits) each are arranged in theform of an array as access units. The value of M shall not be limited to4. It is sufficient to satisfy M≧2, and the actual value of M includesexponents of 2 (2, 4, 8, 16 . . . ). Further, it is sufficient tosatisfy N≧2, and the actual value of N includes exponents of 2 (2, 4, 8. . . ).

When complement data stored, for example, in the memory cell MC_(11p) (pis one of 1, 2, 3 and 4) constituting the first sub-memory unit SMU₁₁and the memory cell MC_(21p) constituting the second sub-memory unitSMU₂₁ is read out, the word line WL₁ is selected, and in a state where avoltage, for example, of (½) V_(cc) is applied to the plate line PL_(j)(j≠p) connected to those memory cells other than the memory cellsMC_(11p) and MC_(21p), the plate line PL_(p) to which the memory cellsMC_(11p) and MC_(21p) are connected is driven. The above V_(cc) refers,for example, a power source voltage. By the above operation, thepotentials corresponding to complement data of 1 bit stored in thememory cells MC_(11p) and MC_(21p) appear in the first-place first bitline BL₁₁ and the first-place second bit line BL₂₁ as bit linepotentials through the first-place first transistor for selection TR₁₁and the first-place second transistor for selection TR₂₁. And, thevoltages (bit line potentials) in the above bit lines BL₁₂ and BL₂₂forming a pair are detected with the differential sense amplifier SA.

Alternatively, as shown in FIG. 22B, there may be employed aconstitution in which the first-place first transistor for selectionTR₁₁ is connected to the word line WL₁₁, the second-place firsttransistor for selection TR₁₂ is connected to the word line WL₁₂, thefirst-place second transistor for selection TR₂₁ is connected to theword line WL₂₁, the second-place second transistor for selection TR₂₂ isconnected to the word line WL₂₂, the word line WL₁₁ and the word lineWL₂₁ are simultaneously driven, and, the word line WL₁₂ and the wordline WL₂₂ are simultaneously driven so that the memory cells MC_(1nm)and MC_(2nm) are simultaneously controlled.

While the present invention has been explained hereinabove withreference to Examples, the present invention shall not be limitedthereto. The structures of the nonvolatile memories, the materials foruse, the various forming conditions, the circuit constitutions, theoperation methods, etc., which are explained in Examples, are give foran illustrative purpose, and may be changed or altered as required.

Generally, when the total number of signal lines per unit for unitdriving is “A”, and if the number of word lines among the signal linesis “B” and if the number of plate lines among the signal lines is “C”,A=B+C is satisfied. When the total number “A” is constant, it issufficient to satisfy B=C for obtaining a maximum total address number(=B×C) per unit. For arranging peripheral circuits most efficiently,therefore, the number “B” of the word lines and the number “C” of theplate lines per unit can be equal to each other. The number of the wordlines per unit in the access unit of a row address is equal to thenumber (N) of stacks of memory cells, and the number of the plate linesis equal to the number (M) of the memory cells constituting thesub-memory unit. With an increase in the numbers of these word lines andthese plate lines, the substantial integration degree of the nonvolatilememory improves. A product of the number of the word lines and thenumber of the plate lines is the number of addresses that can beaccessed. When collective and continuous access is a precondition, avalue obtained by deducting “1” from the above product is the number oftimes of disturbances. The product of the number of the word lines andthe number of the plate lines is therefore determined on the basis ofthe durability of memory cells against disturbance and process factors.The above disturbance refers to a phenomenon in which an electric fieldis exerted on the ferroelectric layer constituting a non-selected memorycell in the direction in which the polarization is inverted, that is, inthe direction in which stored data is deteriorated or destroyed.

The nonvolatile memory in Example 3 or 7 may be modified into astructure as shown in FIG. 23. FIG. 24 shows a circuit diagram thereof.The first memory unit MU₁ and the second memory unit MU₂ have the samestructure. The first memory unit MU₁ will be explained below. Thecircuit diagram shown in FIG. 24 is concerned with a nonvolatile memoryobtained by modification of the nonvolatile memory in Example 7, andwhen the transistor for selection TR_(1n), and the transistor forselection TR_(2n) are connected to different word lines, the modifiednonvolatile memory is a variant of the nonvolatile memory in Example 3.

The first memory unit MU₁ in the above nonvolatile memory comprises afirst bit line BL₁ connected to a differential sense amplifier SA, firsttransistors for selection TR₁₁, TR₁₂, TR₁₃ and TR₁₄ which are N innumber (N≧2; N=4 in this embodiment) and formed of MOS type FETS,sub-memory units SMU₁₁, SMU₁₂, SMU₁₃ and SMU₁₄ which are N in number,and plate lines. The sub-memory unit of the first layer SMU₁₁ iscomposed of memory cells MC_(11m) (m=1, 2 . . . 8) which are M in number(M≧2; M=8 in this embodiment). The sub-memory unit of the second layerSMU₁₂ is also composed of memory cell MC_(12m) (m=1, 2 . . . 8) whichare M (M=8 in number. The sub-memory unit of the third layer SMU₁₃ isalso composed of memory cell MC_(13m) (m=1, 2 . . . 8) which are M (M=8)in number, and the sub-memory unit of the fourth layer SMU₁₄ is alsocomposed of memory cell MC_(14m) (m=1, 2 . . . 8) which are M (M=8) innumber. The number of the plate lines is M (M=8 in this embodiment) andis represented by PL_(m) (m=1, 2 . . . 8). The word line WL_(1n)connected to the gate electrode of the first transistor for selectionTR_(1n) is connected to a word line decoder/driver WD. Each plate linePL_(m) is connected to a plate line decoder/driver PD.

Each memory cell MC_(11m) constituting the sub-memory unit of the firstlayer SMU₁₁ comprises a first electrode 21A, a ferroelectric layer 22Aand a second electrode 23, each memory cell MC_(12m) constituting thesub-memory unit of the second layer SMU₁₂ comprises a first electrode21B, a ferroelectric layer 22B and a second electrode 23, each memorycell MC_(13m) constituting the sub-memory unit of the third layer SMU₁₃comprises a first electrode 31A, a ferroelectric layer 32A and a secondelectrode 33, and each memory cell MC_(14m) constituting the sub-memoryunit of the fourth layer SMU₁₄ comprises a first electrode 31B, aferroelectric layer 32B and a second electrode 33. The first electrodes21A, 21B, 31A and 31B of the memory cells are in common with thesub-memory units SMU₁₁, SMU₁₂, SMU₁₃ and SMU₁₄, respectively. Thesecommon first electrodes 21A, 21B, 31A and 31B will be referred to ascommon nodes CN₁₁, CN₁₂, CN₁₃ and CN₁₄, respectively.

The common first electrode 21A (first common node CN₁₁) in thesub-memory unit of the first layer SMU₁₁ is connected to the first bitline BL₁ through the first-place first transistor for selection TR₁₁.The common first electrode 21B (second common node CN₁₂) in thesub-memory unit of the second layer SMU₁₂ is connected to the first bitline BL₁ through the second-place first transistor for selection TR₁₂.The common first electrode 31A (third common node CN₁₃) in thesub-memory unit of the third layer SMU₁₃ is connected to the first bitline BL₁ through the third-place first transistor for selection TR₁₃.The common first electrode 31B (fourth common node CN₁₄) in thesub-memory unit of the fourth layer SMU₁₄ is connected to the first bitline BL₁ through the fourth-place first transistor for selection TR₁₄.

The memory cell MC_(11m) constituting the sub-memory unit of the firstlayer SMU₁₁ and the memory cell MC_(12m) constituting the sub-memoryunit of the second layer SMU₁₂ have the second electrode 23 in common,and the common second electrode 23 in the m-th-place is connected to thecommon plate line PL_(m). The memory cell MC_(13m) constituting thesub-memory unit of the third layer SMU₁₃ and the memory cell MC_(14m)constituting the sub-memory unit of the fourth layer SMU₁₄ have thesecond electrode 33 in common, and the common second electrode 33 in them-th-place is connected to the common plate line PL_(m). Specifically,the common plate line PL_(m) is formed of an extending portion of thecommon second electrode 23 in the m-th-place, the common plate linePL_(m) is formed of an extending portion of the common second electrode33 in the m-th-place, and these common plate lines PL_(m) areinter-connected in a region that is not shown.

In the nonvolatile memory in this embodiment, the sub-memory units SMU₁₁and SMU₁₂ and sub-memory units SMU₁₃ and SMU₁₄ are stacked through aninsulating layer 26. The sub-memory unit SMU₁₄ is covered with aninsulation layer 36A. The sub-memory unit of the first layer SMU₁₁ isformed above a semiconductor substrate 10 and on the insulating layer16. On the semiconductor substrate 10 is formed a device isolationregion 11. Each of the transistors for selection TR₁₁, TR₁₂, TR₁₃ andTR₁₄ comprises a gate insulating layer 12, a gate electrode 13 andsource/drain regions 14A and 14B. The other source/drain region 14B ofeach of the first-place first transistor for selection TR₁₁, thesecond-place first transistor for selection TR₁₂, the third-place firsttransistor for selection TR₁₃ and the fourth-place first transistor forselection TR₁₄ is connected to the first bit line BL₁ through contactholes 15. One source/drain region 14A of the first-place firsttransistor for selection TR₁₁ is connected to the first common node CN₁₁through a contact hole 18 formed in an opening portion formed throughthe insulating layer 16. One source/drain region 14A of the second-placefirst transistor for selection TR₁₂ is connected to the second commonnode CN₁₂ through a contact hole 18. One source/drain region 14A of thethird-place first transistor for selection TR₁₃ is connected to thethird common node CN₁₃ through a contact hole 18, a pad portion 25 and acontact hole 28 formed in an opening portion formed through theinsulating layer 26. One source/drain region of the fourth-place firsttransistor for selection TR₁₄ is connected to the fourth common nodeCN₁₄ through a contact hole 18, a pad portion 25 and a contact hole 28.The above structure can be applied to the nonvolatile memories in otherExamples.

For example, as a variant of the nonvolatile memory in Example 3 or 7,there may be employed a structure in which first electrodes 21′ and 31′are formed as upper electrodes, and second electrodes 23′ and 33′ areformed as lower electrodes as shown in FIG. 25. The above structure canbe also applied to the nonvolatile memories in other Examples. In FIG.25, reference numerals 26B and 26C indicate a lower layer and an upperlayer of an insulating layer, and reference numerals 36B and 36Cindicate a lower layer and an upper layer of an insulation layer.

In the nonvolatile memory explained in Example 4 with reference to theschematic partial cross-sectional view of FIG. 11 and the circuitdiagrams of FIGS. 12 to 14, there may be employed a constitution inwhich the memory cell MC_(11m) in the m-th-place constituting the firstsub-memory unit of the first layer SMU₁₁ in the first memory unit andthe memory cell MC_(12m) in the m-th-place constituting the firstsub-memory unit of the second layer SMU₁₂ in the first memory unit forma pair and share the plate line PL_(m) to store data of 1 bit each. Inthis case, when the first and second reference capacitors RC₁ and RC₂are constituted of MOS capacitors as shown in the circuit diagram ofFIG. 12, and when data stored in the memory cell MC_(11p) constitutingthe first sub-memory unit SMU₁₁ is read out, the word line WL₁₁ isselected, and in a state where a voltage, for example, of (½) V_(cc) isapplied to the plate line PL_(j) (j≠p), the plate line. PL_(p) isdriven. By this operation, a potential corresponding to data of 1 bitstored in the memory cell MC_(11p) appears in the first-place first bitline BL₁₁ as a bit line potential through the first-place firsttransistor for selection TR₁₁. And, a switching circuit SW₁₂ is broughtinto an ON-state. As a result, a reference potential V_(REF-2) appearsin the second-place first bit line BL₁₂ as a bit line potential. Thevoltages (bit line potentials) in the bit lines BL₁₁ and BL₁₂ forming apair are detected with the differential sense amplifier SA.

When the first and second reference capacitors RC_(A1), RC_(A2), RC_(B1)and RC_(B2) are constituted of the ferroelectric capacitors each, andwhen data is read out from a memory cell, the switching circuitsSW_(A12), SW_(A22), SW_(B12) and SW_(B22) are brought into an ON-statein advance, the second electrodes constituting the reference capacitorsRC_(A1), RC_(A2) RC_(B1) and RC_(B2) are connected to areference-plate-line driver RPD, and a predetermined potential isapplied to reference-plate lines PL_(REF-A1), PL_(REF-A2), PL_(REF-B1)and PL_(REF-B2) from the reference-plate-line driver RPD. As a result, acharge is accumulated in the ferroelectric layer constituting each ofthe reference capacitors RC_(A1), RC_(A2), RC_(B1), and RC_(B2). And,when data stored, for example, in the memory cell MC_(11p) constitutingthe first sub-memory unit SMU₁₁ is read out, the word line WL₁₁ isselected, and in a state where a voltage, for example, of (½) V_(cc) isapplied to the plate line PL_(j) (j≠p), the plate line PL_(p) is driven.By the above operation, a potential corresponding to data of 1 bitstored in the memory cell MC_(11p) appears in the first-place first bitline BL₁₁ as a bit line potential through the first-place firsttransistor for selection TR₁₁. And, in a state where a proper electricfield is applied to the ferroelectric layer of the reference capacitorRC_(A2), the switching circuit SW_(A21) is brought into an ON-state. Asa result, the reference potential V_(REF-2) appears in the second-placefirst bit line BL₁₂ as a bit line potential. And, the voltages (bit linepotentials) in the above bit lines BL₁₁ and BL₁₂ forming a pair aredetected with the differential sense amplifier SA.

When data stored, for example, in the memory cell MC_(22p) constitutingthe second sub-memory unit SMU₂₂ is read out, the word line WL₂₂ isselected, and in a state where a voltage, for example, of (½) V_(cc) isapplied to the plate line PL_(j) (j≠p), the plate line PL_(p) is driven.By the above operation, a potential corresponding to data of 1 bitstored in the memory cell MC_(22p) appears in the second-place secondbit line BL₂₂ as a bit line potential through the second-place secondtransistor for selection TR₂₂. And, in a state where a proper electricfield is applied to the ferroelectric layer of the reference capacitorRC_(A2), the switching circuit SW_(A21) is brought into an ON-state. Asa result, the reference potential V_(REF-2) appears in the second-placefirst bit line BL₁₂ as a bit line potential. And, the voltages (bit linepotentials) in the above bit lines BL₁₂ and BL₂₂ forming a pair aredetected with the differential sense amplifier SA.

In the ferroelectric-type nonvolatile semiconductor memory according toany one of the first to fourth aspects of the present invention, thereference potentials having different potential levels are provided tothe bit lines connected to the memory cells belonging to differentthermal history groups, or one reference potential is provided to thememory cells constituting the first and second sub-memory units of then-th layer, and other different potential is provided to the memorycells constituting the first and second sub-memory units of the k-thlayer (k≠n), so that proper reference potentials can be provided to thebit lines even if there are included memory cells having differentthermal histories with regard to their production processes, and thatalmost no difference is caused between those bit line potentials thatappear in the bit lines. In the ferroelectric-type nonvolatilesemiconductor memory according to any one of the fifth to seventhaspects of the present invention, a complement data of 1 bit is storedin a pair of the memory cells. It is ensured that these memory cellsforming a pair belong to the same thermal history group with regard totheir production processes, so that almost no change is caused betweenthose bit line potentials that appear in the bit lines. As aconsequence, finer memory cells can be formed, and stacking of thememory cells is accomplished, so that there can be provided aferroelectric-type nonvolatile semiconductor memory that permits a highoperation margin, has high reliably and has a high integration degree.

In the ferroelectric-type nonvolatile semiconductor memory according tothe fourth aspect of the present invention, one transistor forwriting-in, one transistor for detection, one transistor for read-outand transistors for selection which are N in number are sufficient formemory cells which are M×N in number, so that the cell area per bit canbe further decreased. Further, the operation of the transistor fordetection is controlled by the potential that occurs in the common firstelectrode on the basis of data stored in the memory cell, and the firstelectrode is in common with the memory cells which are M in number, sothat there is caused a state where a kind of additional load capacity isadded to the first electrode. As a result, when a voltage is applied tothe plate line for reading-out of data, an increase in the potential ofthe first electrode can be suppressed, and a sufficient potentialdifference is generated between the first electrode and the secondelectrode, so that the ferroelectric layer reliably undergoespolarization inversion.

1-3. (canceled)
 4. A ferroelectric-type nonvolatile semiconductor memorycomprising a first memory unit and a second memory unit; said firstmemory unit having; (A-1) a first bit line, (B-1) a first transistor forselection, (C-1) first sub-memory units which are N in number (N≧2) andeach of which is composed of memory cells which are M in number (M≧2),and (D-1) plate lines which are M×N in number, and said second memoryunit having; (A-2) a second bit line, (B-2) a second transistor forselection, (C-2) second sub-memory units which are N in number and eachof which is composed of memory cells which are M in number, and (D-2)the plate lines which are M×N in number and are shared with the platelimes which are M×N in number and constitute said first memory unit,wherein the first sub-memory unit of an n-th layer (n=1, 2 . . . , N)and the second sub-memory unit of the n-th layer are formed on the sameinsulating layer, the first sub-memory unit of an n′-th layer (n′=2 . .. N) and the second sub-memory unit of the n′-th layer are stacked onthe first sub-memory unit of the (n′−1)-th layer and the secondsub-memory unit of the (n′−1)-th layer through the insulating layer,each memory cell comprises a first electrode, a ferroelectric layer anda second electrode, in the first memory unit, the first electrodes ofthe memory cells constituting the first sub-memory unit of the n-thlayer are in common with the first sub-memory unit of the n-th layer,said common first electrode is connected to the first bit line throughthe first transistor for selection, and the second electrode of thememory cell in an m-th-place (m=1, 2 . . . M) is connected to the commonplate line in the [(n−1)M+m]-th-place, in the second memory unit, thefirst electrodes of the memory cells constituting the second sub-memoryunit of the n-th layer are in common with the second sub-memory unit ofthe n-th layer, said common first electrode is connected to the secondbit line through the second transistor for selection, and the secondelectrode of the memory cell in the m-th-place is connected to thecommon plate line in the [(n−1)M+m]-th-place, the memory cellsconstituting the first sub-memory unit of the n-th layer and the memorycells constituting the second sub-memory unit of the n-th layer have thesame thermal history with regard to their production processes, thememory cells constituting the first sub-memory unit of the n-th layerand the memory cells constituting the second sub-memory unit of the n-thlayer have the thermal history different from the thermal history of thememory cells constituting the first sub-memory unit of a k-th layer(k≠n) and the memory cells constituting the second sub-memory unit ofthe k-th layer, the memory cell in the m-th-place constituting the firstsub-memory unit of the n-th layer in the first memory unit and thememory cell in the m-th-place constituting the second sub-memory unit ofthe n-th layer in the second memory unit form a pair to store data of 1bit each, a reference potential having an n-th potential is provided tothe second bit line when data stored in the memory cell constituting thefirst sub-memory unit of the n-th layer in the first memory unit is readout, a reference potential having an n-th potential is provided to thefirst bit line when data stored in the memory cell constituting thesecond sub-memory unit of the n-th layer in the second memory unit isread out, and the n-th potential differs from the k-th potential (k≠n).5. The ferroelectric-type nonvolatile semiconductor memory according toclaim 4, in which reference capacitors which are N in number are furtherprovided and the reference capacitor in an n-th-place provides areference potential having an n-th potential.
 6. The ferroelectric-typenonvolatile semiconductor memory according to claim 5, in which thereference capacitor in the n-th-place has a thermal history that is thesame as the thermal history of the memory cells constituting the firstsub-memory unit of the n-th layer and the memory cells constituting thesecond sub-memory unit of the n-th layer.
 7. The ferroelectric-typenonvolatile semiconductor memory according to claim 6, in which thefirst sub-memory unit of the n-th layer, the second sub-memory unit ofthe n-th layer and the reference capacitor in the n-th-place are formedon the same insulating layer.
 8. A ferroelectric-type nonvolatilesemiconductor memory comprising a first memory unit and a second memoryunit; said first memory unit having; (A-1) a first bit line, (B-1) firsttransistors for selection which are N in number (N≧2), (C-1) firstsub-memory units which are N in number and each of which is composed ofmemory cells which are M in number (M≧2), and (D-1) plate lines whichare M in number and each of which is shared with each memory cellconstituting each of the first sub-memory units which are N in number,between or among the first sub-memory units which are N in number, andsaid second memory unit having; (A-2) a second bit line, (B-2) secondtransistors for selection which are N in number, (C-2) second sub-memoryunits which are N in number and each of which is composed of memorycells which are M in number, and (D-2) the plate lines which are M innumber, each of which is shared with each memory cell constituting eachof the second sub-memory units which are N in number, between or amongthe second sub-memory units which are N in number, and which are sharedwith the plate lines which constitute said first memory unit and are Min number, wherein the first sub-memory unit of an n-th layer (n=1, 2 .. . N) and the second sub-memory unit of the n-th layer are formed onthe same insulating layer, the first sub-memory unit of an n′-th layer(n′=2 . . . N) and the second sub-memory unit of the n′-th layer arestacked on the first sub-memory unit of the (n′−1)-th layer and thesecond sub-memory unit of the (n′−1)-th layer through the insulatinglayer, each memory cell comprises a first electrode, a ferroelectriclayer and a second electrode, in the first memory unit, the firstelectrodes of the memory cells constituting the first sub-memory unit ofthe n-th layer are in common with the first sub-memory unit of the n-thlayer, said common first electrode is connected to the first bit linethrough the n-th-place first transistor for selection, and the secondelectrode of the memory cell in an m-th-place (m=1, 2 . . . M) isconnected to the common plate line in the m-th-place, in the secondmemory unit, the first electrodes of the memory cells constituting thesecond sub-memory unit of the n-th layer are in common with the secondsub-memory unit of the n-th layer, said common first electrode isconnected to the second bit line through the n-th-place secondtransistor for selection, and the second electrode of the memory cell inthe m-th-place is connected to the common plate line in the m-th-place,the memory cells constituting the first sub-memory unit of the n-thlayer and the memory cells constituting the second sub-memory unit ofthe n-th layer have the same thermal history with regard to theirproduction processes, the memory cells constituting the first sub-memoryunit of the n-th layer and the memory cells constituting the secondsub-memory unit of the n-th layer have the thermal history differentfrom the thermal history of the memory cells constituting the firstsub-memory unit of a k-th layer (k≠n) and the memory cells constitutingthe second sub-memory unit of the k-th layer, the memory cell in them-th-place constituting the first sub-memory unit of the n-th layer inthe first memory unit and the memory cell in the m-th-place constitutingthe second sub-memory unit of the n-th layer in the second memory unitform a pair to store data of 1 bit each, a reference potential having ann-th potential is provided to the second bit line when data stored inthe memory cell constituting the first sub-memory unit of the n-th layerin the first memory unit is read out, a reference potential having ann-th potential is provided to the first bit line when data stored in thememory cell constituting the second sub-memory unit of the n-th layer inthe second memory unit is read out, and the n-th potential differs fromthe k-th potential (k≠n).
 9. The ferroelectric-type nonvolatilesemiconductor memory according to claim 8, in which the first bit lineswhich are N in number and the second bit lines which are N in number areprovided, the common first electrode in the first sub-memory unit of then-th layer is connected to the n-th-place first bit line through then-th-place first transistor for selection in the first memory unit, thecommon first electrode in the second sub-memory unit of the n-th layeris connected to the n-th-place second bit line through the n-th-placesecond transistor for selection in the second memory unit, the referencepotential having the n-th potential is provided to the n-th-place secondbit line when data stored in the memory cell constituting the firstsub-memory unit of the n-th layer in the first memory unit is read out,and the reference potential having the n-th potential is provided to then-th-place first bit line when data stored in the memory cellconstituting the second sub-memory unit of the n-th layer in the secondmemory unit is read out.
 10. The ferroelectric-type nonvolatilesemiconductor memory according to claim 8, in which reference capacitorswhich are N in number are further provided and the reference capacitorin an n-th-place provides a reference potential having an n-thpotential.
 11. The ferroelectric-type nonvolatile semiconductor memoryaccording to claim 10, in which the reference capacitor in then-th-place has a thermal history that is the same as the thermal historyof the memory cells constituting the first sub-memory unit of the n-thlayer and the memory cells constituting the second sub-memory unit ofthe n-th layer.
 12. The ferroelectric-type nonvolatile semiconductormemory according to claim 11, in which the first sub-memory unit of then-th layer, the second sub-memory unit of the n-th layer and thereference capacitor in the n-th-place are formed on the same insulatinglayer. 13-16. (canceled)
 17. A ferroelectric-type nonvolatilesemiconductor memory comprising a plurality of memory cells each ofwhich comprises a first electrode, a ferroelectric layer formed at leaston said first electrode and a second electrode formed on saidferroelectric layer, a plurality of the memory cells belonging to one oftwo or more thermal history groups having different thermal historieswith regard to their production processes, wherein complementary 1 bitdata is stored in a pair of the memory cells, and said pair of thememory cells belong to the same thermal history group.
 18. Theferroelectric-type nonvolatile semiconductor memory according to claim17, in which the memory cells have a structure in which the memory cellsare stacked through an insulating layer, the memory cells formed on oneinsulating layer belong to the thermal history group different from thethermal history group to which the memory cells formed on otherinsulating layer belong, and the memory cells fared on the sameinsulating layer belong to the same thermal history group.
 19. Aferroelectric-type nonvolatile semiconductor memory comprising a firstmemory unit and a second memory unit; said first memory unit having;(A-1) a first bit line, (B-1) a first transistor for selection, (C-1)first sub-memory units which are N in number (N≧2) and each of which iscomposed of memory cells which are M in number (M≧2), and (D-1) platelines which are M×N in number, and said second memory unit having; (A-2)a second bit line, (B-2) a second transistor for selection, (C-2) secondsub-memory units which are N in number and each of which is composed ofmemory cells which are M in number, and (D-2) the plate lines which areM×N in number and are shared with the plate lines which are M×N innumber and constitute said first memory unit, wherein the firstsub-memory unit of an n-th layer (n=1, 2 . . . N) and the secondsub-memory unit of the n-th layer are formed on the same insulatinglayer, the first sub-memory unit of an n′-th layer (n′=2 . . . N) andthe second sub-memory unit of the n′-th layer are stacked on the firstsub-memory unit of the (n′−1)-th layer and the second sub-memory unit ofthe (n′−1)-th layer through the insulating layer, each memory cellcomprises a first electrode, a ferroelectric layer and a secondelectrode, in the first memory unit, the first electrodes of the memorycells constituting first sub-memory unit of the n-th layer are in commonwith the first sub-memory unit of the n-th layer, said common firstelectrode is connected to the first bit line through the firsttransistor for selection, and the second electrode of the memory cell inan m-th-place (m=1, 2 . . . M) is connected to the common plate line inthe [(n−1)M+m]-th-place, in the second memory unit, the first electrodesof the memory cells constituting the second sub-memory unit of the n-thlayer are in common with the second sub-memory unit of the n-th layer,said common first electrode is connected to the second bit line throughthe second transistor for selection, and the second electrode of thememory cell in the m-th-place is connected to the common plate line inthe [(n−1)M+m]-th-place, the memory cells constituting the firstsub-memory unit of the n-th layer and the memory cells constituting thesecond sub-memory unit of the n-th layer have the same thermal historywith regard to their production processes, the memory cells constitutingthe first sub-memory unit of the n-th layer and the memory cellsconstituting the second sub-memory unit of the n-th layer have thethermal history different from the thermal history of the memory cellsconstituting the first sub-memory unit of a k-th layer (k≠n) and thememory cells constituting the second sub-memory unit of the k-th layer,and the memory cell in the m-th-place constituting the first sub-memoryunit of the n-th layer in the first memory unit and the memory cell inthe m-th-place constituting the second sub-memory unit of the n-th layerin the second memory unit form a pair to store complement data.
 20. Aferroelectric-type nonvolatile semiconductor memory comprising a firstmemory unit and a second memory unit; said first memory unit having;(A-1) a first bit line, (B-1) first transistors for selection which areN in number (N≧2), (C-1) first sub-memory units which are N in numberand each of which is composed of memory cells which are M in number(M≧2), and (D-1) plate lines which are M in number and each of which isshared with each memory cell constituting each of the first sub-memoryunits which are N in number, between or among the first sub-memory unitswhich are N in number, and said second memory unit having; (A-2) asecond bit line, (B-2) second transistors for selection which are N innumber, (C-2) second sub-memory units which are N in number and each ofwhich is composed of memory cells which are M in number, and (D-2) theplate lines which are M in number, each of which is shared with eachmemory cell constituting each of the second sub-memory unit which are Nin number, between or among the second sub-memory units which are N innumber, and which are shared with the plate lines which are M in numberand constitute said first memory unit, wherein the first sub-memory unitof an n-th layer (n=1, 2 . . . N) and the second sub-memory unit of then-th layer are formed on the same insulating layer, the first sub-memoryunit of an n′-th layer (n′=2 . . . N) and the second sub-memory unit ofthe n-th layer are stacked on the first sub-memory unit of the (n′−1)-thlayer and the second sub-memory unit of the (n′−1)-th layer through theinsulating layer, and each memory cell comprises a first electrode, aferroelectric layer and a second electrode, in the first memory unit,the first electrodes of the memory cells constituting the firstsub-memory unit of the n-th layer are in common with the firstsub-memory unit of the n-th layer, said common first electrode isconnected to the first bit line through the n-th-place first transistorfor selection, and the second electrode of the memory cell in anm-th-place (m=1, 2 . . . M) is connected to the common plate line in them-th-place, in the second memory unit, the first electrodes of thememory cells constituting the second sub-memory unit of the n-th layerare in common with the second sub-memory unit of the n-th layer, saidcommon first electrode is connected to the second bit line through then-th-place second transistor for selection, and the second electrode ofthe memory cell in the m-th place is connected to the common plate linein the m-th place, the memory cells constituting the first sub-memoryunit of the n-th layer and the memory cells constituting the secondsub-memory unit of the n-th layer have the same thermal history withregard to their production processes, the memory cells constituting thefirst sub-memory unit of the n-th layer and the memory cellsconstituting the second sub-memory unit of the n-th layer have thethermal history different from the thermal history of the memory cellsconstituting the first sub-memory unit of a k-th layer (k≠n) and thememory cells constituting the second sub-memory unit of the k-th layer,and the memory cell in the m-th-place constituting the first sub-memoryunit of the n-th layer in the first memory unit and the memory cell inthe m-th-place constituting the second sub-memory unit of the n-th layerin the second memory unit form a pair to store complement data.
 21. Theferroelectric-type nonvolatile semiconductor memory according to claim20, in which the first bit lines which are N in number and the secondbit lines which are N in number are provided, the common first electrodein the first sub-memory unit of the n-th layer is connected to then-th-place first bit line through the n-th-place first transistor forselection in the first memory unit, and the common first electrode inthe second sub-memory unit of the n-th layer is connected to then-th-place second bit line through the n-th-place second transistor forselection in the second memory unit.